基于电喷印集成制造阵列化嵌金属电极柔性微流体管道  

Fabrication of flexible microfluidic pipes with embedded metal electrodes based on electrohydrodynamic jet printing

作　　者：吕孝峰 郭洪吉 孙丽娜[1] 杨婷 邹旿昊[2,3,4] 仲亚 于海波 LU XiaoFeng;GUO Hongji;SUN LiNa;YANG Ting;ZOU WuHao;ZHONG Ya;YU HaiBo(School of Mechanical Engineering and Automation,Northeastern University,Shenyang 110819,China;State Key Laboratory of Robotics,Shenyang Institute of Automation,Chinese Academy of Sciences,Shenyang I1016,China;Institutes for Robotics and Intelligent Manufacturing,Chinese Academy of Sciences,Shenyang 110016,China;University of Chinese Academy of Sciences,Beijing 10010l,China)

机构地区：[1]东北大学机械工程与自动化学院,沈阳110819 [2]中国科学院沈阳自动化研究所,机器人学国家重点实验室,沈阳110016 [3]中国科学院机器人与智能制造创新研究院,沈阳110016 [4]中国科学院大学,北京100101

出　　处：《中国科学：技术科学》2023年第4期525-535,共11页Scientia Sinica(Technologica)

基　　金：国家重点研发计划项目(编号:2018YFB1304904);国家自然科学基金项目(批准号:91848201)资助。

摘　　要：微流控芯片在生物、化学、医学等领域受到了研究者们的广泛关注,尤其是含有金属电极的微流体管道在毛细电泳、电化学微量检测、生物医学工程和柔性电子领域具有广泛的需求前景.文章提出了一种简单按需制备阵列化嵌金属电极柔性微流体管道的方法.该方法基于电喷印直写技术并结合翻模和湿法刻蚀工艺,实现了嵌金属电极柔性微流体管道阵列的制备.首先,通过在线性转动接收基底上叠加直写聚乙烯醇(PVA)纤维,制备了可嵌入聚二甲基硅氧烷(PDMS)的表面光滑的线性凸起微结构(线宽为10~100μm,高宽比可大于1:2),并以此作为模板,实现了阵列化柔性微流体沟道的制造;其次,通过在平动接收基底上直写光刻胶作为保护层,并结合湿法刻蚀工艺,实现了在含有微流体沟道阵列的柔性基底上金属图案化导电电极(线宽低至5μm)的灵活制造;最后,对通入不同浓度盐溶液的微流体管道进行电学测试,验证了其管道的导通性和金属电极的导电性.结果表明:基于电喷印的集成制造流程可以灵活、简单、高效、低成本的按需加工阵列化嵌金属电极柔性微流体管道,有望应用在生物医学工程和柔性电子等领域.Microfluidic chips have attracted increasing research attention in biology,chemistry,and medicine;in particular,microfluidic pipes containing metal electrodes have broad prospects in capillary electrophoresis,electrochemical microdetection,biomedical engineering,and flexible electronics.In this study,a simple on-demand method for fabricating arrayed flexible microfluidic pipes with embedded metal electrodes was proposed.The method is based on the direct-writing technology of electrohydrodynamic jet printing(E-jet),which is combined with the conventional mold turning and wet etching processes to obtain flexible microfluidic pipe arrays with embedded metal electrodes.First,a linear convex microstructure with a smooth surface(line width of 10–100μm and aspect ratio 1:2)was prepared by stacking direct-writing polyvinyl alcohol fibers using the E-jet printing system with a linear rotation-receiving substrate to serve as a template.Using the template,the arrayed microfluidic channels were obtained.Second,a flexible metal patterned conductive electrode(line width 5μm)was printed on the flexible microfluidic pipe array substrate using the E-jet printing system with a linear translation-receiving substrate and the wet etching process,with a direct-writing photoresist as the protective layer.Finally,the microfluidic pipes were electrically tested with different salt solution concentrations to verify the conductivity of the pipes and the metal electrode.The results indicate that the integrated manufacturing process based on the E-jet printing could be used to simply and efficiently fabricate flexible microfluidic pipe arrays embedded with gold electrodes on-demand and at a low cost.These arrays can be broadly applied in biomedical engineering and flexible electronics.

关 键 词：电喷印 柔性微流体管道 无掩膜制造 柔性图案化金属电极 

分 类 号：TN405[电子电信—微电子学与固体电子学] O646.5[理学—物理化学]