One-step printable platform for high-efficiency metasurfaces down to the deep-ultraviolet region  

作　　者：Joohoon Kim Wonjoong Kim Dong Kyo Oh Hyunjung Kang Hongyoon Kim Trevon Badloe Seokwoo Kim Chanwoong Park Hojung Choi Heon Lee Junsuk Rho 

机构地区：[1]Department of Mechanical Engineering,Pohang University of Science and Technology(POSTECH),Pohang 37673,Republic of Korea [2]Department of Materials Science and Engineering,Korea University,Seoul 02841,Republic of Korea [3]Department of Chemical Engineering,Pohang University of Science and Technology(POSTECH),Pohang 37673,Republic of Korea [4]POSCO-POSTECH-RIST Convergence Research Center for Flat Optics and Metaphotonics,Pohang 37673,Republic of Korea [5]NationallInstitute of Nanomaterials Technology(NINT),Pohang 37673,Republic of Korea

出　　处：《Light(Science & Applications)》2023年第4期551-557,共7页光（科学与应用)（英文版）

基　　金：supported by the POSCO-POSTECH-RIST Convergence Research Center program funded by POSCO,a university R&D program funded by Samsung Electronics,and the National Research Foundation(NRF)grants(NRF-2022M3C1A3081312,NRF-2022M3H4A1A02074314,NRF-2021K1A3A1A17086079,NRF-2021K2A9A2A15000174,CAMM-2019M3A6B3030637,NRF-2019R1A5A8080290)funded by the Ministry of Science and ICT(MSIT)of the Korean government.

摘　　要：A single-step printable platform for ultraviolet(UV)metasurfaces is introduced to overcome both the scarcity of low-loss UV materials and manufacturing limitations of high cost and low throughput.By dispersing zirconium dioxide(ZrO_(2))nanoparticles in a UV-curable resin,ZrO_(2)nanoparticle-embedded-resin(nano-PER)is developed as a printable material which has a high refractive index and low extinction coefficient from near-UV to deep-UV.In ZrO_(2)nano-PER,the UV-curable resin enables direct pattern transfer and ZrO_(2)nanoparticles increase the refractive index of the composite while maintaining a large bandgap.With this concept,UV metasurfaces can be fabricated in a single step by nanoimprint lithography.As a proof of concept,UV metaholograms operating in near-UV and deep-UV are experimentally demonstrated with vivid and clear holographic images.The proposed method enables repeat and rapid manufacturing of UV metasurfaces,and thus will bring UV metasurfaces more close to real life.

关 键 词：RESIN high enable 

分 类 号：O4[理学—物理]