高精度静电惯性传感器  

High precision electrostatic inertial sensor

作　　者：王铖锐 白彦峥[1] 蔡林[1] 胡明[1] 刘力 马云 屈少波[1] 吴书朝[1] 尹航 于健博 周泽兵[1] WANG ChengRui;BAI YanZheng;CAI Lin;HU Ming;LIU Li;MA Yun;QU ShaoBo;WU ShuChao;YIN Hang;YU JianBo;ZHOU ZeBing(School of Physics,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]华中科技大学物理学院,武汉430074

出　　处：《中国科学：物理学、力学、天文学》2023年第5期22-38,共17页Scientia Sinica Physica,Mechanica & Astronomica

基　　金：国家自然科学基金(编号:11975105,11727814,12075092,41874217,42274229);国家重点基础研究发展计划(编号:2021YFC2202500,2020YFC2200803,2020YFC2200804,2020YFC2200502,2020YFC2200702,2022YFC2204102)资助项目。

摘　　要：高精度静电惯性传感器是卫星重力测量、空间引力波探测和航天器微重力测量等应用领域的关键技术之一.本文介绍高精度空间静电惯性传感器的基本工作原理,给出惯性传感器的噪声模型,明确惯性传感器主要指标的设计原则,阐述惯性传感器的地面测试方法,基于惯性传感器敏感探头、检验质量和极板框架的精密结构体系,以及惯性传感器平衡间距、偏置电压、载波电压和反馈电压的参数设计,实现了惯性传感器分辨率10^(−8)到10^(−12) m/s^(2)/Hz^(1/2)量级的性能指标,满足了不同航天任务对惯性传感器量程和分辨率的需求,最后对更高精度的惯性传感器研究进行展望.The high precision electrostatic inertial sensor is one of the key technologies used in satellite gravity measurement,space-gravity wave detection,and spacecraft microgravity measurement.This paper presents the basic working principle,provides the noise model,defines the design principle of the main parameters,and expounds on the ground test method of the inertial sensor.The precision structure system is based on the inertial sensor sensitive probe,test mass,and electrode frame and the parameter design of inertial sensor balance distance,bias voltage,carrier voltage,and feedback voltage.It is possible to achieve the performance index of inertial sensor resolution between 10^(−8) and 10^(−12) m/s^(2)/Hz^(1/2),which satisfies the range and resolution requirements for inertial sensors in various space missions.Finally,the future development of inertial sensors with higher precision has been discussed.

关 键 词：引力波探测 空间引力实验 高精度惯性传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]