Embedding epitaxial VO_(2)film with quality metal-insulator transition to SAW devices  

作　　者：M.E.Kutepov §,G.Ya.Karapetyan T.A.Minasyan V.E.Kaydashev I.V.Lisnevskaya K.G.Abdulvakhidov A.A.Kozmin E.M.Kaidashev 

机构地区：[1]Laboratory of Nanomaterials,Southern Federal University,200/1 Stachki Ave.344090 Rostov-on-Don,Russia [2]Department of Chemistry,Southern Federal University,7 Zorge St.344090 Rostov-on-Don,Russia [3]Smart Materials Research Institute,Southern Federal University,178/24 Sladkova St.344090 Rostov-on-Don,Russia

出　　处：《Journal of Advanced Dielectrics》2022年第5期53-59,共7页先进电介质学报（英文）

基　　金：supported by Southern Federal University research project No.07/2020-06-MM and 10th Anniversary International Conference on“Physics and Mechanics of New Materials and Their Applications”(PHENMA 2021-2022).

摘　　要：Epitaxial VO_(2)films grown by pulsed laser deposition(PLD)method with superior phase transition related switching characteristics are successfully embedded to SAW devices using concept of the“impedance loaded SAW sensor”.A resistance of VO2 sensor abruptly drops from 0.7 MΩto 90Ωwhen it is heated above~65℃and shows a narrow hysteresis loops when switching.Two designs of SAW devices are examined in which RF signal is reflected back from interdigital transducer(IDT)or a surface acoustic waves(SAW)is transferred through a coupler and the RF response is altered 2 and 3 times correspondingly upon the phase transition in VO2.In the proposed devices with external load,a SAW does not propagate via VO2 film and therefore is not attenuated which is beneficiary for wireless applications.Additionally,a SAW phase shift as great as 50°is induced to the SAW transferred through the coupler due to the phase transition in VO2.The proposed approach may boost the development of remotely controlled autonomous sensors,including those based on VO2 metamaterials and hybrid plasmonic structures for near IR/middle IR and sub-THz/THz applications.

关 键 词：Surface acoustic wave SAW pulsed laser deposition PLD VO_(2) epitaxial film. 

分 类 号：TM21[一般工业技术—材料科学与工程]