三维成像技术的光学元件表面粗糙度智能测量方法  

Intelligent measurement method of optical element surface roughness for 3d imaging technology

作　　者：王艳贞[1] 王晓芬[1] 韩立华[1] WANG Yanzhen;WANG Xiaofen;HAN Lihua(Shijiazhuang Tiedao University,Shijiazhuang 050000,China)

机构地区：[1]石家庄铁道大学,石家庄050000

出　　处：《激光杂志》2023年第4期229-234,共6页Laser Journal

基　　金：河北省重点研发计划项目(No.22375801D)。

摘　　要：光学元件在多个领域起着至关重要的作用,其应用性能的优劣主要由表面粗糙度决定,对此,提出三维成像技术的光学元件表面粗糙度智能测量方法。采集光学元件表面图像,并进行预处理,然后采用重构算法获取到光学元件表面三维图像,并使用最小二乘中线提取元件表面三维形貌的中面,最后在表面三维形貌中面计算出三维粗糙度评价参数,实现光学元件表面粗糙度智能测量。实验数据显示:设计方法测量的表面粗糙度因子平均误差最小值达到了0.5%,测量精度高达100%,证明本方法的光学元件表面粗糙度测量性能较佳。Optical elements play an important role in many fields,and their application performance is mainly determined by surface roughness.Therefore,an intelligent measurement method of optical element surface roughness based on 3D imaging technology is proposed.The optical element surface image is collected and pretreated,and then the reconstruction algorithm is used to obtain the three-dimensional image of the optical element surface,and the middle surface of the three-dimensional surface topography of the element surface is extracted using the least square centerline.Finally,the three-dimensional roughness evaluation parameters are calculated on the middle surface of the three-dimensional surface topography to achieve the intelligent measurement of the optical element surface roughness.The experimental data show that the minimum average error of the surface roughness factor measured by the design method reaches 0.5%,and the measurement accuracy reaches 100%,which proves that the optical element surface roughness measurement performance of the method in this paper is better.

关 键 词：光学元件 智能测量 三维成像技术 表面粗糙度 三维评定 多层聚焦 

分 类 号：TN249[电子电信—物理电子学]