SiO_(2)-SiN_(x)体系光学谐振腔中Ti超导薄膜特性的研究  

Research on the Properties of Ti Superconducting Thin Films in SiO_(2)-SiN_(x)System Optical Resonator

作　　者：刘海燕 孙潇莹 李劲劲[2] 王雪深[2] 陈建 高鹤 周哲海[1] 徐骁龙 LIU Hai-yan;SUN Xiao-ying;LI Jing-jing;WANG Xue-shen;CHEN Jian;GAO He;ZHOU Zhe-hai;XU Xiao-long(Beijing Information Science and Technology University,Beijing 100192,China;National Institute of Metrology,Beijing 100029,China;Shenyang University of Chemical Technology,Shenyang,Liaoning 110142,China)

机构地区：[1]北京信息科技大学机械行业现代光电测试技术重点实验室,北京100192 [2]中国计量科学研究院,北京100029 [3]沈阳化工大学,辽宁沈阳110142

出　　处：《计量学报》2023年第4期549-554,共6页Acta Metrologica Sinica

基　　金：国家自然科学基金青年科学基金(61901432,61701470);国家市场监督管理总局科技计划(2020MK153,2019MK112);中国计量科学研究院基本科研业务费重点领域项目(AKYZD1903);北京长城学者支持计划(CIT&TCD20190323);北京青年拔尖人才支持计划(Z2019042)。

摘　　要：设计良好的光学谐振腔是提高超导转变边沿传感器(TES)光学效率的有效手段,光学谐振腔结构厚度的变化,不仅对TES的光学效率有影响,而且会产生不同的残余应力进而影响TES的超导特性。研究了以超导Ti膜为TES功能层材料,同时选用SiO_(2)-SiN_(x)体系作为光学谐振腔薄膜。通过对数值仿真,确定了SiO_(2)-SiN_(x)体系光学谐振腔薄膜厚度变化对Ti-TES光学吸收效率的影响。分析了SiO_(2)-SiN_(x)体系光学谐振腔不同薄膜厚度的变化自身应力随之变化的趋势,最后制备了不同厚度SiO_(2)-SiN_(x)光学谐振腔的TES,并进行光学吸收效率的测试,验证了SiO_(2)-SiN_(x)体系光学谐振腔薄膜厚度对Ti-TES光学吸收效率变化的规律。Well-designed optical cavity is an effective method to improve the optical efficiency of superconducting transition edge sensor(TES).Changes in the multi-layer films thickness of the optical cavity affect not only the optical efficiency but also the superconducting performance of TES due to the changes in film s stress.The Ti film is selected as the superconducting material of the TES functional layer due to its excellent characteristics at low temperature.Also,the SiO_(2)-SiN_(x)system is selected as the optical cavity film.Through the numerical simulation of the film thickness,the influence of the thickness of the SiO_(2)-SiN_(x)system optical resonator film on the optical absorption efficiency of Ti-TES is determined.Analyzed the tendency of the stress of the SiO_(2)-SiN_(x)system optical resonator with different film thicknesses,and finally prepared TES with different thicknesses of the SiO_(2)-SiN_(x)optical resonator,and tested the optical absorption efficiency to verify the SiO_(2)-SiN_(x)The influence of the film thickness of the system optical resonator on the Ti-TES optical absorption efficiency.

关 键 词：计量学 TES 超导薄膜 光学谐振腔 SiO_(2)-SiN_(x)体系 Ti膜 

分 类 号：TB96[机械工程—光学工程]