半导体薄膜表面粘附的非对称性偏压调控  

Asymmetric bias-tunable surface adhesion of semiconductor nanofilms

作　　者：李保文 轩啸宇 殷艳 周建新 张助华 易敏 郭万林 Baowen Li;Xiaoyu Xuan;Yan Yin;Jianxin Zhou;Zhuhua Zhang;Min Yi;Wanlin Guo(Key Laboratory for Intelligent Nano Materials and Devices of the Ministry of Education,and Institute of Nanoscience,State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics and Astronautics,Nanjing,210016,China)

机构地区：[1]Key Laboratory for Intelligent Nano Materials and Devices of the Ministry of Education,and Institute of Nanoscience,State Key Laboratory of Mechanics and Control of Mechanical Structures,Nanjing University of Aeronautics and Astronautics,Nanjing,210016,China

出　　处：《Acta Mechanica Sinica》2023年第3期1-6,共6页力学学报（英文版）

基　　金：This work was supported by the National and Jiangsu Province Natural Science Foundation(Grant Nos.T2293691,T2293692,and BK20212008)of China;National Key Research and Development Program of China(Grant No.2019YFA0705400);China Postdoctoral Science Foundation(Grant No.2021M701703);Jiangsu Funding Program for Excellent postdoctoral talent(Grant No.2022ZB211),the Research Fund of State Key Laboratory of Mechanics and Control of Mechanical Structures(Grant No.MCMS-I-0422K01);the Fundamental Research Funds for the Central Universities(Grant No.NJ2022002);the Fund of Prospective Layout of Scientific Research for NUAA(Nanjing University of Aeronautics and Astronautics).

摘　　要：电调控表面粘附对微机电系统是至关重要的,同时相对于外加电压极性常具有对称性.本文以二硫化钼为研究对象,以石墨烯、氮化硼和n型硅为参照组展示半导体薄膜表面的非对称粘附行为.研究主要通过导电原子力显微镜和理论模拟来揭示金探针与金基底上二硫化钼之间的偏压调控粘附力的行为.结果反映二硫化钼表面偏压对粘附的调控能力远大于参照组材料,这种非对称行为主要来源于半导体薄膜与背电极之间形成的肖特基结中的内建电场.Electrically tunable surface adhesion is of vital importance for ubiquitous microelectromechanical systems,and is normally symmetric to the applied bias voltage.Here we report the asymmetric bias-tunable surface adhesion of semiconductor nanofilms by taking molybdenum disulfide(MoS2)as a demo with graphene,hexagonal boron nitride,and bulk n-type doped silicon serving as the normal control group.The bias-tunable adhesion force between the Au-coated tip and the Au back electrode supported MoS2 nanofilms was deciphered by combining conductive atomic force microscopic examinations in vacuum and theoretical simulations.The asymmetric bias-tunability is found to be significantly stronger than that of the control group,attributing to the built-in electric field at the Schottky junction between the nanofilm and back electrode.

关 键 词：Surface adhesion Molybdenum disulfide Conductive atomic force microscope Schottky junction 

分 类 号：TB34[一般工业技术—材料科学与工程]