激光系统用密封圈除气对真空光学元件性能影响  

Influence of vacuum baking O-rings on optical properties of laser system

作　　者：牛龙飞[1] 尤辉 吕海兵[1] 蒋一岚[1] 周国瑞[1] 李昌朋[1] 黄林 黄进[1] 苗心向[1] 姚彩珍 蒋晓东[1] Niu Longfei;You Hui;LüHaibing;Jiang Yilan;Zhou Guorui;Li Changpeng;Huang Lin;Huang Jin;Miao Xinxiang;Yao Caizhen;Jiang Xiaodong(Laser Fusion Research Center,CAEP,Mianyang 621900,China)

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2023年第6期28-32,共5页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(12174355)。

摘　　要：光学真空系统内的非金属材料出气会产生分子态污染,导致光学元件的透过率降低,进而会加剧激光诱导损伤,降低高功率激光装置的负载能力。提出对通光环境内的密封材料进行优选,开展热真空烘烤实验研究。结果表明,氟橡胶246出气量较小,温度对材料除气效果影响较大,且密封圈经过真空烘烤除气对光学特性影响较低,与密封圈不进行真空烘烤处理相比,紫外段平均透过率变化减少1个数量级,平均损伤密度降低了56%。该技术可应用于高功率激光装置精密洁净领域和其他精密光学洁净系统。The outgassing of non-metallic materials in optical vacuum system will produce molecular contamination,which will lead to the decrease of transmittance of optical elements,and then aggravate laser-induced damage and reduce the load capacity of high-power laser facilities.In this paper,it is proposed to optimize the sealing materials in the laser environment,and carry out the experimental study of thermal vacuum baking.The results show that fluoroelastomer 246 has low outgassing,and temperature has great influence on the degassing effect of the material,and the vacuum baking degassing of the sealing ring has little influence on the optical characteristics.Compared with the sealing ring without vacuum baking,the average UV transmittance change decreased by 1 order of magnitude,and the average damage density decreased by 56%.This technology can be used in high-power laser facilities for precision cleaning and other optical cleaning systems.

关 键 词：出气污染 非金属材料 真空烘烤 相对质量 

分 类 号：TG580.233[金属学及工艺—金属切削加工及机床]