光栅投影在机三维形貌检测技术研究进展  

Research progress of grating projection on machine 3D topography inspection technology

作　　者：吕虹毓 李茂月[1] 蔡东辰 赵伟翔 LV Hong-yu;LI Mao-yue;CAI Dong-chen;ZHAO Wei-xiang(Key Laboratory of Advanced Manufacturing and Intelligent Technology,Ministry of Education,Harbin University of Science and Technology,Harbin 150080,China)

机构地区：[1]哈尔滨理工大学先进制造智能化技术教育部重点实验室,黑龙江哈尔滨150080

出　　处：《中国光学（中英文）》2023年第3期500-513,共14页Chinese Optics

基　　金：国家自然科学基金资助项目(No.51975169);黑龙江省普通高校基本科研业务费专项资金资助项目(No.2019-KYYWF-0204)。

摘　　要：基于视觉的测量方式对航天、军工以及电子芯片等先进制造领域具有良好应用前景以及深远的发展意义,而基于结构光的在机三维视觉检测技术,是目前精密加工领域的热点与难点之一。本文以结构光在机三维测量流程为主线,将其中的关键技术,包括测量标定、相位优化求解、在机三维点云处理及不同特征曲面重构中的技术要求、涉及的方法和原理、相关研究现状及目前存在的问题,进行论述与总结。最后,根据未来相关技术的实际需求,在加工现场标定、动态实时三维重构、亚微米及纳米级测量、测量-加工一体化数据传输技术等方面进行了展望,并提出了相应的研究思路。Vision-based measurement has good application prospects and far-reaching development significance for advanced manufacturing fields such as aerospace,the military industry and electronic chips.Among them,on-machine 3D vision detection technology based on structured light is one of the hotspots and challenges in the field of precision machining.Based on the on-machine 3D measurement process of structured light,we discuss and summarize the key technologies,including its technical requirements,methods and principles involved,related research status and existing problems in the measurement calibration,phase optimization solution,on-machine 3D point cloud processing and reconstruction of different feature surfaces.Finally,according to the actual needs of relevant technologies in the future,prospects are made with regard to processing field calibration,dynamic real-time 3D reconstruction,sub-micron and nano measurement,and measurement processing integrated data transmission technology,with the corresponding research ideas put forward.

关 键 词：光栅投影 三维形貌 在机检测 机器视觉 表面重构 

分 类 号：TH741[机械工程—光学工程]