基于EFPI-FBG结构的光纤复合传感器研究  

Optical Hybrid Sensor Based on EFPI-FBG Structure

作　　者：刘冬冬[1] 王伟[2] 王昆鹏 刘彬 LIU Dong-dong;WANG Wei;WANG Kun-peng;LIU Bin(92493 Unit of PLA,Huludao 125001,China;Xi'an Aerospace Propulsion Test Technology Institute,Xi'an 710100,China;AECC Shenyang Liming Aero-Engine CO.,LTD,Shenyang 110000,China;College of Information and Communication,Harbin Engineering University,Harbin 150001,China)

机构地区：[1]中国人民解放军92493部队,葫芦岛125001 [2]西安航天动力试验技术研究所,西安710100 [3]沈阳黎明航空发动机集团有限公司,沈阳110000 [4]哈尔滨工程大学信息与通信工程学院,哈尔滨150001

出　　处：《宇航计测技术》2023年第2期51-57,82,共8页Journal of Astronautic Metrology and Measurement

基　　金：青年科学基金项目(52001096);中央高校基础科研业务费资助(307202|CFT0803)。

摘　　要：研究了一种基于非本征型Fabry-Perot干涉仪(EFPI)和光纤Bragg光栅(FBG)串联结构构成的EFPI-FBG光纤复合传感器,用于实现对压力和温度信号的同步测量。传感器选用熔融石英作为压力敏感材料,利用飞秒激光焊接技术实现传感器探头结构的封装。对传感器的工作原理进行了分析,制作并封装传感器工程样机,搭建测试系统,对传感器的性能进行了灵敏度及交叉敏感性分析。结果表明,该传感器在0.8 MPa范围内的灵敏度约为-0.729μm/MPa,在50℃~200℃范围的温度灵敏度为0.009 nm/℃,传感器压力测量最大允许误差为±4.12%FS。该EFPI-FBG复合传感器有望应用于压力—温度双参数测量需求的技术领域。An EFPI-FBG fiber hybrid sensor based on an extrinsic Fabry-Perot interferometer(EFPI)and a fiber Bragg grating(FBG)structure is studied to measure pressure and temperature simultaneously.Fused silica is used as the pressure-sensitive material,and femtosecond laser welding technology is used to package the sensor head.The working principle of the sensor is analyzed,fabricated and tested in detail.The results show that the sensitivity of the sensor in the range of 0.8 MPa is about-0.729μm/MPa,and the temperature sensitivity in the range of 50℃~200℃is 0.009 nm/℃.The marimum permissible error of the sensor is±4.12%FS.The investigated EFPI-FBG hybrid sensor is expected to be applied in fields requiring pressure-temperature dual-parameter measurement.

关 键 词：光纤 压力 温度 传感器 

分 类 号：TN253[电子电信—物理电子学]