A flexible pressure sensor with highly customizable sensitivity and linearity via positive design of microhierarchical structures with a hyperelastic model  

作　　者：Zhenjin Xu Dezhi Wu Zhiwen Chen Zhongbao Wang Cong Cao Xiangyu Shao Gang Zhou Shaohua Zhang Lingyun Wang Daoheng Sun 

机构地区：[1]Department of Mechanical and Electrical Engineering,Xiamen University,Xiamen,361005,China [2]Shenzhen Research Institute of Xiamen University,Shenzhen,518057,China [3]Beijing Key Laboratory of Long-Life Technology of Precise Rotation and Transmission Mechanisms,Beijing Institute of Control Engineering,Beijing,100094,China

出　　处：《Microsystems & Nanoengineering》2023年第1期103-114,共12页微系统与纳米工程（英文）

基　　金：supported by the National Natural Science Foundation of China (52075464);the National Key Research and Development Program of China (2021YFB3203302);the Special Funds from the Central Government to Guide Local Scientific and Technological Development (2021Szvup068);the Beijing Key Laboratory of Long-life Technology of Precise Rotation and Transmission Mechanisms (BZ0388202106).

摘　　要：The tactile pressure sensor is of great significance in flexible electronics,but sensitivity customization over the required working range with high linearity still remains a critical challenge.Despite numerous efforts to achieve high sensitivity and a wide working range,most sensitive microstructures tend to be obtained only by inverting naturally existing templates without rational design based on fundamental contact principles or models for piezoresistive pressure sensors.Here,a positive design strategy with a hyperelastic model and a Hertzian contact model for comparison was proposed to develop a flexible pressure sensor with highly customizable linear sensitivity and linearity,in which the microstructure distribution was precalculated according to the desired requirement prior to fabrication.As a proof of concept,three flexible pressure sensors exhibited sensitivities of 0.7,1.0,and 1.3 kPa−1 over a linear region of up to 200 kPa,with a low sensitivity error(<5%)and high linearity(~0.99),as expected.Based on the superior electromechanical performance of these sensors,potential applications in physiological signal recognition are demonstrated as well,and such a strategy could shed more light on demand-oriented scenarios,including designable working ranges and linear sensitivity for next-generation wearable devices.

关 键 词：hierarchical TEMPLATE CUSTOM 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]