Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes  

作　　者：Zhenming Liu Haoran Wen Farrokh Ayazi 

机构地区：[1]School of Electrical and Computer Engineering,Georgia Institute of Technology,Atlanta,GA,30308,USA [2]StethX Microsystems Inc.,Atlanta,GA,30308,USA

出　　处：《Microsystems & Nanoengineering》2023年第1期149-159,共11页微系统与纳米工程（英文）

基　　金：supported by the Army Research Lab under Contract W911NF20C0019.

摘　　要：In this paper,a modification to the eigenmode operation of resonant gyroscopes is introduced.The multi-coefficient eigenmode operation can improve cross-mode isolation due to electrode misalignments and imperfections,which is one of the causes of residual quadrature errors in conventional eigenmode operations.A 1400µm annulus aluminum nitride(AlN)on a silicon bulk acoustic wave(BAW)resonator with gyroscopic in-plane bending modes at 2.98 MHz achieves a nearly 60 dB cross-mode isolation when operated as a gyroscope using a multi-coefficient eigenmode architecture.The as-born frequency mismatches in multiple devices are compensated by physical laser trimming.The demonstrated AlN piezoelectric BAW gyroscope shows a large open-loop bandwidth of 150 Hz and a high scale factor of 9.5 nA/°/s on a test board with a vacuum chamber.The measured angle random walk is 0.145°/√h,and the bias instability is 8.6°/h,showing significant improvement compared to the previous eigenmode AlN BAW gyroscope.The results from this paper prove that with multi-coefficient eigenmode operations,piezoelectric AlN BAW gyroscopes can achieve a noise performance comparable to that of their capacitive counterpart while having the unique advantage of a large open-loop bandwidth and not requiring large DC polarization voltages.

关 键 词：mode loop operations 

分 类 号：TH-39[机械工程]