多通道薄膜铌酸锂阵列波导光栅研制  

Development of Multi-channel Thin Film Lithium Niobate Arrayed Waveguide Grating

作　　者：王琛全 何晓舟 王子彦 钱坤 顾晓文 唐杰 钱广 WANG Chenquan;HEXiaozhou;WANG Ziyan;QIAN Kun;GU Xiaowen;TANG Jie;QIAN Guang(Nanjing Electronic Devices Institute,Nanjing,210016,CHN;Natianal Key Laboratory of Solid-state Microwale Devices and Circuits,Nanjing,210016,CHN;The Shanghai Bureau of Air Force Equipment Department,Shanghai,200231,CHN)

机构地区：[1]南京电子器件研究所,南京210016 [2]固态微波器件与电路全国重点实验室,南京210016 [3]空军装备部上海局,上海200231

出　　处：《固体电子学研究与进展》2023年第2期187-190,共4页Research & Progress of SSE

基　　金：国家重点研发计划资助项目(2022YFB2802702);江苏省产业前瞻技术研发项目(BE2021030)。

摘　　要：基于薄膜铌酸锂材料平台,通过开发金属掩膜与ICP刻蚀相结合的波导制备工艺,研制出了8通道且通道间隔400 GHz的阵列波导光栅,器件整体尺寸为1.28 mm×1.38 mm。测试结果表明,该阵列波导光栅的串扰小于-15 dB,通道非均匀性小于0.5 dB。该器件为薄膜铌酸锂基波分复用技术积累了研制经验,并有望推进多通道微波光子模块的小型化应用。Based on the LNOI material platform,the arrayed waveguide grating with 8 channels and 400 GHz channel spacing was developed by the development of the metal mask and ICP etching technology.The overall size of the device is 1.28 mm×1.38 mm.The test results show that the crosstalk of the arrayed waveguide grating is less than-15 dB and the channel non-uniformity is less than O.5 dB.The device has accumulated experience in the development of LNOI based WDM technology and is expected to promote the miniaturization of multi-channel microwave photonics modules.

关 键 词：阵列波导光栅 薄膜铌酸锂 波分复用 

分 类 号：TN256[电子电信—物理电子学]