石英表面OTS自组装多层膜的制备及抗弛豫性能  

Preparation of self-assembled OTS multilayer film on the surface of quartz and its anti-relaxation property

作　　者：方向前 刘晓雅 马宗敏[1,2] FANG Xiangqian;LIU Xiaoya;MA Zongmin(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China;School of Instrument and Electronics,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学动态测试技术国家重点实验室,山西太原030051 [2]中北大学仪器与电子学院,山西太原030051

出　　处：《电镀与涂饰》2023年第9期59-67,共9页Electroplating & Finishing

基　　金：国家自然科学基金(61874100)。

摘　　要：采用浸没法在石英表面制备了十八烷基三氯硅烷(OTS)自组装多层膜,采用水接触角测量仪、傅里叶变换红外光谱仪(FTIR)和原子力显微镜(AFM)分析了不同浸没时间所得OTS多层膜的疏水性、成分和表面形貌,确定了较佳成膜时间为30 min。制备的OTS多层膜均匀致密,厚度约为2.7 nm,水接触角为110.4°。采用AFM检测了OTS多层膜在不同温度下的能量耗散和弛豫率,结果显示两者随温度的升高均呈现先下降后上升的趋势,耗散量级是石蜡的10倍,弛豫率为石蜡的3~4倍,说明制备的OTS多层膜在较低温度(25~60℃)下具有一定的抗弛豫性能,但不如石蜡。A self-assembled octadecyltrichlorosilane(OTS)multilayer film was prepared on the surface of quartz by immersion method.The hydrophobicity,composition,and surface morphology of the OTS multilayer films obtained by immersion for different time were analyzed using water contact angle gauge,Fourier-transform infrared spectroscope(FTIR),and atomic force microscope(AFM),respectively.The optimal film formation time was determined to be 30 min.The OTS multilayer film was uniform and compact with a thickness of about 2.7 nm and a water contact angle of 110.4°.The energy dissipation and relaxation rate of OTS multilayer film at different temperatures were examined by AFM.The results showed that both energy dissipation and relaxation rate of OTS multilayer film were decreased initially and then increased with the rising of temperature.The order of magnitude of energy dissipation of OTS multilayer film was 10 times that of paraffin,and the relaxation rate of the former was 3-4 times that of the latter,indicating that OTS multilayer film has certain anti-relaxation effect at low temperature(25-60℃),but is not as good as paraffin.

关 键 词：十八烷基三氯硅烷 自组装多层膜 石英 能量耗散 抗弛豫性能 

分 类 号：TG178[金属学及工艺—金属表面处理] TQ586.5[金属学及工艺—金属学]