高均匀性1×4多模干涉耦合器的研究与设计  

Research and Design of 1×4 Multimode Interference Coupler with High Uniformity

作　　者：李赵一 范作文 丛庆宇 周敬杰 曾宪峰 郑少南 董渊 胡挺 钟其泽 贾连希 LI Zhao-yi;FAN Zuo-wen;CONG Qing-yu;ZHOU Jing-jie;ZENG Xian-feng;ZHENG Shao-nan;DONG Yuan;HU Ting;ZHONG Qi-ze;JIA Lian-xi(School of Microelectronics,Shanghai University,Shanghai 201800,China;Shanghai Institute of Microsystem and Information Technology(SIMIT),Chinese Academy of Sciences(CAS),Shanghai 200050,China;Shanghai IndustrialμTechnology Research Institute,Shanghai 201800,China)

机构地区：[1]上海大学微电子学院,上海201800 [2]中科院上海微系统与信息技术研究所,上海200050 [3]上海微技术工业研究院,上海201800

出　　处：《光通信研究》2023年第3期53-59,共7页Study on Optical Communications

基　　金：国家重点研发计划资助项目(2018YFB2200503)。

摘　　要：针对多输出端口输出光功率的不均匀性问题,文章设计了一种基于绝缘体上硅(SOI)的1×4多模干涉(MMI)耦合器,提出了一种优化其均匀性的新方法。耦合器输入/输出端采用锥形波导,为提升MMI耦合器的均匀性,对输出端锥形波导采用不等宽设计,通过优化,四路输出端口均匀性高达0.0074 dB,而总的插损仅有0.058 dB。依据该方法最终使得输出端波导的传输常数失配,避免了波导之间的串扰,实现了对MMI耦合器输出端口均匀性的提升。For the problem of inhomogeneity of the output optical power of multiple output ports,the paper designs a 1×4 Multimode Interference(MMI)coupler based on Silicon-On-Insulator(SOI)and proposes a new method to optimize its homogeneity.A tapered waveguide is used at the input/output of the coupler.To improve the uniformity of the MMI coupler,an unequal-width design is used for the tapered waveguide at the output.After optimization,the uniformity of the four output ports is as high as 0.0074 dB,while the total insertion loss is only 0.058 dB.According to this method,the transmission constant of the output,avoid crosstalk between waveguides,and achieve an improvement in the uniformity of the output port of the MMI coupler.

关 键 词：硅光子学 多模干涉耦合器 均匀性 损耗 

分 类 号：TN252[电子电信—物理电子学]