基于质谱法的大气压介质阻挡放电等离子体中O_(3)和N_(2)O组分的测量  

Determination of O_(3) and N_(2)O Components in Atmospheric Pressure Dielectric Barrier Discharge Plasma Based on Mass Spectrometry

作　　者：张腾飞 文明 黄龙呈 冯高平 王殿恺 韦康 ZHANG Teng-fei;WEN Ming;HUANG Long-cheng;FENG Gao-ping;WANG Dian-kai;WEI Kang(State Key Laboratory of Laser Propulsion&Application,Space Engineering University,Beijing 101400,China;Xichang Satellite Launch Center,Liangshan Yi Autonomous Prefecture 615000,China)

机构地区：[1]航天工程大学激光推进及其应用国家重点实验室,北京101400 [2]西昌卫星发射中心,四川凉山彝族自治州615000

出　　处：《质谱学报》2023年第3期452-460,I0006,共10页Journal of Chinese Mass Spectrometry Society

摘　　要：为提高介质阻挡放电(DBD)在大气压条件下低温等离子体的产率以及设备的稳定性和可靠性,降低处理成本,提高航天发射废水的降解率,利用四极杆质谱仪设计了一套基于质谱法的大气压DBD等离子体中O_(3)和N_(2)O组分测量系统,通过测量等离子体组分和未放电时的大气组分来证实该方法的可行性。结果表明,在101.325 kPa大气压条件下,使用6管同轴介质阻挡放电,在控制电压为200 V时,O_(3)和N_(2)O的组分浓度达到最高;在控制电压为200 V,空气流量为7.8 L/min时,O_(3)的组分浓度达到最高;在空气流量为3.8 L/min时,N_(2)O的组分浓度达到最高。综上所述,控制电压和空气流量对等离子体组分浓度有较大影响,解决了传统质谱法难以应用于大气压条件下DBD等离子体活性产物测量和强电场对质谱仪干扰的问题。本研究结果在DBD反应器的优化、关键参数的调控和实现大气压DBD在降解航天推进剂废水的工程实际应用方面具有参考价值。Atmospheric dielectric barrier discharge(DBD) plasma has a broad application prospect in wastewater treatment.O_(3) and N_(2)O are important components of atmospheric plasma,and are affected by many factors.High-precision real-time measurement of O_(3) and N_(2)O concentrations in plasma is of great significance for optimizing discharge parameters and reactor design.Mass spectrometry has high specificity and sensitivity,and can simultaneously obtain the component concentrations of various substances and their changes with time.This research solved the traditional mass spectrometry is applied to hard under the condition of atmospheric pressure dielectric barrier discharge plasma active products measure and the problem of mass spectrometer is susceptible to interference of strong electric field,and designed a set of atmospheric pressure using quadrupole mass spectrometer O_(3) and N_(2)O in the DBD plasma components of measurement system.At atmospheric pressure of 101.325 kPa,plasma was generated on a six-tube coaxial dielectric barrier discharge structure by a high voltage power supply with microsecond pulse width.The experimental results showed that the control voltage and the air flow have great influence on plasma component concentration.When the control voltage is 200 V,the composition of O_(3) and N_(2)O is higher than that of other control voltages.When the control voltage is 200 V and the air flow is 7.8 L/min,the concentration of O_(3) reaches the highest.The concentration of N_(2)O reaches the highest when the air flow rate is 3.8 L/min.The measurement methods and experimental results have important application value in the optimization of DBD reactor,the control of key parameters,and the application of dielectric barrier discharge plasma at atmospheric pressure.

关 键 词：介质阻挡放电(DBD) 等离子体 O_(3) N_(2)O 质谱 

分 类 号：O657.63[理学—分析化学] V51[理学—化学] X592[航空宇航科学与技术—航空宇航推进理论与工程]