非接触三点内径测量法中角度安装误差的校准方法研究  

Calibration of Angle Setting Error in Non-contact Inner Diameter Measurement by Three-point Method

作　　者：钟亦林 马有为 丁国清[1] 马英超 陈欣[1] ZHONG Yi-lin;MA You-wei;DING Guo-qing;MA Ying-chao;CHEN Xin(School of Electric Information and Electrical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China;Shanghai Aerospace Control Technology Institute,Shanghai 201109,China)

机构地区：[1]上海交通大学电子信息与电气工程学院,上海200240 [2]上海航天控制技术研究所,上海201109

出　　处：《仪表技术与传感器》2023年第4期107-112,共6页Instrument Technique and Sensor

基　　金：国家重点研发计划“国家质量基础的共性技术研究与应用”专项(2019YFF0216401)。

摘　　要：由于操作简便,非接触三点内径测量法常用于工业现场测量。为提高工件内径测量精度,对在安装中无法避免的位移传感器角度安装误差进行分析建模,提出了一个新的考虑角度安装误差的非接触内径测量模型及一种基于多观测位置联立方程的误差校准方法。通过仿真分析了模型中观测位置数、工件内径尺寸与其他参数的设置对校准结果的影响,确认了在观测位置数大于4时即可实现对误差的校准。最终,使用激光位移传感器构建内径测量系统并开展实验,验证了角度安装误差校准方法的有效性,圆工件的内径测量的绝对精度与重复性精度分别在0.6μm与0.4μm以下。The non-contact inner diameter measurement by three-point method is commonly used in industrial situ measurement,because it operates uncomplicatedly.In order to improve the accuracy of measuring inner diameter of workpieces,the unavoidable angle setting error of displacement sensors during installation was analyzed and modeled,and a new non-contact inner diameter measurement model considering angle setting error and an error calibration method based on simultaneous equations of multiple observation positions were proposed.The influence of the number of observation positions,inner diameter of workpieces and other parameter settings in the model on the calibration results was analyzed through simulation,and it was confirmed that the error can be calibrated when the number of observation positions is bigger than 4.Finally,the experiment was carried out through an inner diameter measurement system built with laser displacement sensors,which verified the effectiveness of the calibration method of angle setting error,and proved that the absolute accuracy and the repeatability accuracy of measuring inner diameters of workpieces can be respectively less than 0.6μm and 0.4μm.

关 键 词：内径测量 角度安装误差 校准 激光位移传感器 

分 类 号：TH701[机械工程—仪器科学与技术]