VOC废气焚烧炉新增改造实例研究  

A Case Study on the New Transformation of VOC Waste Gas Incinerator

作　　者：范程斌 FAN Cheng-bin(ABCD Integrated Circuit Manufacturing(Shanghai)Co.,Ltd.,Shanghai 200093,China)

机构地区：[1]ABCD集成电路制造(上海)有限公司,上海200093

出　　处：《价值工程》2023年第14期69-74,共6页Value Engineering

摘　　要：因FAB1 S3 VOC系统老化严重,TO炉故障频次居高不下,现场都需要人工手动操作设备启停,运营成本大、运行维护操作繁杂琐碎、系统维修成本较高等缺点。本文结合中芯厂区内的VOC系统老化汰换改造项目,通过采用一键启动,对原有的VOC设施进行了汰换升级改造。实践证明:投入运行半年来,系统运行平稳,运营成本等相关数据都有明显的大幅下降,最终实现24小时全天运行,VOC环保在线监测设备排放数据均达到环保局所要求排放大气标准内。Due to the severe aging of the FAB1 S3 VOC system and the high frequency of TO furnace failures,manual operation of equipment startup and shutdown is required on site,resulting in high operating costs,complex and trivial operation and maintenance,as well as high system maintenance costs.This article combines the aging and replacement renovation project of the VOC system in the SMIC factory area,and upgrades the existing VOC facilities through one click startup.Practice has proven that over the past six months of operation,the system has been running smoothly,with significant reductions in operating costs and other related data.Ultimately,24-hour operation has been achieved,and the emission data of VOC environmental protection online monitoring equipment meets the atmospheric emission standards required by the Environmental Protection Bureau.

关 键 词：VOC 废气焚烧炉 沸石转轮 

分 类 号：X787[环境科学与工程—环境工程]