基于铌酸锂/BCB/聚酰亚胺结构的柔性声表面波器件的设计与仿真  

Design and Simulation of Flexible Surface Acoustic Wave Device Based on Lithium Niobate/BCB/Polyimide Structure

作　　者：陈健中 彭斌[1] 张万里[1] 林庚辉 高令桥 CHEN Jianzhong;PENG Bin;ZHANG Wanli;LIN Genghui;GAO Lingqiao(School of Electronic Science and Engineering,University of Electronic Science and Technology of China,Chengdu 611731,China)

机构地区：[1]电子科技大学电子科学与工程学院,四川成都611731

出　　处：《压电与声光》2023年第2期169-173,共5页Piezoelectrics & Acoustooptics

摘　　要：该文采用有限元法对“铌酸锂/苯并环丁烯(BCB)/聚酰亚胺”结构的柔性声表面波器件进行了研究。结果表明,铌酸锂厚度为0.06λ~0.8λ(λ为周期)时,不能激发稳定的瑞利波,在此区间外可激发瑞利波。随着温度升高,器件的谐振频率降低,计算结果表明,声速随温度变化是谐振频率下降的主要原因,大于热膨胀引起的谐振频率变化。仿真结果为设计和制备柔性声表面波器件时合理选择压电薄膜厚度及衬底材料力学性能等参数提供了一定的理论依据。In this paper,a flexible surface acoustic wave device with“lithium niobate/benzocyclobutene(BCB)/polyimide”structure is simulated and studied by finite element simulation method.The results show that the stable Rayleigh wave cannot be excited when the thickness of lithiumniobate(LN)is between 0.06λ~0.8λ,while outside this interval,Rayleigh waves can be excited.When the temperature increases,the resonant frequency of the device decreases.The calculation results show that the change of sound velocity with temperature is the main reason,which is greater than the frequency shift caused by thermal expansion.The simulation results in this paper provide a theoretical basis for the reasonable selection of piezoelectric film thickness and mechanical properties of substrate materials when designing and fabricating flexible surface acoustic wave devices.

关 键 词：柔性声表面波器件 铌酸锂/苯并环丁烯(BCB)/聚酰亚胺 有限元仿真 温度 

分 类 号：TN384[电子电信—物理电子学]