高结构对称性微半球陀螺设计与制造  

Design and Fabrication of Micro Shell Resonator Gyroscope with High Structure Symmetry

作　　者：梅松 杨峰[1,2,3] 文路 卢昱瑾 贺韵祺 陈朝春 韩世川[1,2,3] 雷霆 林丙涛[1,2,3] MEI Song;YANG Feng;WEN Lu;LU Yujin;HE Yunqi;CHEN Chaochun;HAN Shichuan;LEI Ting;LIN Bingtao(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;Solid Inertial Technology Enterprise Engineering Technology Research Center of Chongqing,Chongqing 401332,China;Solid Inertial Technology Engineering Laboratory of Chongqing City,Chongqing 401332,China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]重庆市固态惯性技术企业工程技术研究中心,重庆401332 [3]重庆市固态惯性技术工程实验室,重庆401332

出　　处：《压电与声光》2023年第2期220-225,共6页Piezoelectrics & Acoustooptics

摘　　要：针对陀螺高精度小型化需求,该文设计了一种微半球陀螺结构,建立微半球陀螺三维有限元模型,研究了微半球谐振子结构对称性对陀螺性能的影响规律。提出了谐振子圆度及1~4阶质量不对称误差的评价方法,实现了谐振子制造工艺优化,优化后的谐振子圆度误差≤2μm,在此基础上研制了微半球陀螺样机。结果表明,封装后陀螺样机的周向品质因数(Q)值分布为(9.024~9.183)×10^(5),均匀性为±0.87%;速率模式下,陀螺量程为±20(°)/s时,陀螺零偏不稳定性为0.0138(°)/h,角度随机游走为0.0068(°)/√h,展现了高结构对称性微半球陀螺的性能潜力。In response to the demand for high-precision miniaturization of gyroscopes,a micro shell resonator gyroscope(mHRG)structure is designed in this paper.The three-dimensional finite element model is established and the effect of structural symmetry on the gyro performance is investigated.An evaluation method for the roundness of resonator and the asymmetric error of 1-4 order mass is proposed.The process of resonator fabrication is optimized,and the roundness error of the optimized resonator is≤2μm,on this basis,a micro shell resonator gyroscope(mHRG)prototype is developed.The performance of the encapsulated mHRG is tested.The results showed the circumference quality factor(Q)distribution is between(9.024-9.183)×10^(5) with a uniformity of±0.87%.In the force-rebalance mode,the gyroscope range is±20(°)/s,the bias instability(Allan deviation)of the gyroscope is 0.0138(°)/h,and the angle random walk(ARW)is 0.0068(°)/√h.This study demonstrates the performance potential of the micro-hemisphere gyros with high structural symmetry.

关 键 词：微型半球陀螺 圆度误差 质量不对称 品质因数(Q)值均匀性 零偏不稳定性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]