超快激光制备高频1-3型PIN-PMN-PT复合材料超声换能器  

Fabrication of High-Frequency PIN-PMN-PT 1-3 Piezoelectric Composite Transducers Based on Ultrafast Laser

作　　者：刘友健 雷智洪 吴俊伟 陈燕 纪轩荣 LIU Youjian;LEI Zhihong;WU Junwei;CHEN Yan;JI Xuanrong(State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment,Guangdong University of Technology,Guangzhou 510006,China)

机构地区：[1]广东工业大学省部共建精密电子制造技术与装备国家重点实验室,广东广州510006

出　　处：《压电与声光》2023年第2期288-293,共6页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(51975131,U2133213);广东省“珠江人才计划”引进创新创业团队基金资助项目(2016ZT06G375)。

摘　　要：与其他压电材料相比,1-3型压电单晶复合材料具有优异的压电性能和更匹配的声学特性,更有利于制备出性能优异的超声换能器。该文通过有限元软件COMSOL对复合材料的振动模态及阻抗特性进行了系统的研究,同时采用皮秒激光制备了高频1-3型Pb(In_(1/2)Nb_(1/2))O_(3)-Pb(Mg_(1/3)Nb_(2/3))O_(3)-PbTiO_(3)(PIN-PMN-PT)铁电单晶/环氧树脂复合材料,并进行了性能表征。该1-3复合材料机电耦合系数为0.65,声阻抗为19.96 MRayls。该复合材料可用于制备高频超声换能器,结果表明,换能器中心频率为17.68 MHz,-6 dB带宽为84.38%,插入损耗为-25.4 dB。Compared with other piezoelectric materials,1-3 piezoelectric single crystal composite materials have excellent piezoelectric properties and better acoustic matching properties,which are better for preparing high-performance ultrasonic transducers.In this paper,the vibration mode and impedance characteristics of the composites were systematically investigated by the finite element software COMSOL,and the high-frequency Pb(In_(1/2)Nb_(1/2))O_(3)-Pb(Mg_(1/3)Nb_(2/3))O_(3)-PbTiO_(3)(PIN-PMN-PT)ferroelectric single crystal/epoxy resin 1-3 composites were prepared by picosecond laser and their performance was characterized.The electromechanical coupling coefficient of the prepared 1-3 piezoelectric composites is 0.65,acoustic impedance is 19.96 MRayls.A high-frequency ultrasound transducer is fabricated by using the 1-3 composites.The transducer has center frequency of 17.68 MHz,-6 dB bandwidth of 84.38%and insertion loss of-25.4 dB.

关 键 词：1-3型压电复合材料 Pb(In_(1/2)Nb_(1/2))O_(3)-Pb(Mg_(1/3)Nb_(2/3))O_(3)-PbTiO_(3)(PIN-PMN-PT)单晶 皮秒激光 超声换能器 有限元 

分 类 号：TM22[一般工业技术—材料科学与工程] TN30[电气工程—电工理论与新技术] TN384[电子电信—物理电子学]