一维光声晶体微腔中实现声学量子态探测的关键技术  

Key Technologies for Detecting Acoustic Quantum States in One-Dimensional Optomechanical Crystal Nanobeam

作　　者：夏紫微 唐锦道 蒋沁原 陈培钦 李浩[2] 周强 尤立星[2] 王浟 宋海智 郭光灿[1,3] 邓光伟 XIA Ziwei;TANG Jindao;JIANG Qinyuan;CHEN Peiqin;LI Hao;ZHOU Qiang;YOU Lixing;WANG You;SONG Haizhi;GUO Guangcan;DENG Guangwei(Institute of Fundamental and Frontier Sciences,University of Electronic Science and Technology of China,Chengdu 610054;Shanghai Institute of Microsystem and Information Technology Chinese Academy of Science Changning,Changning Shanghai 200050;CAS Key Laboratory of Quantum Information,University of Science and Technology of China,Hefei 230026;Southwest Institute of Technical Physics,Chengdu 610041)

机构地区：[1]电子科技大学基础与前沿研究院,成都610054 [2]中国科学院上海微系统与信息技术研究所,上海长宁区200050 [3]中国科学技术大学中国科学院量子信息重点实验室,合肥230026 [4]西南技术物理研究所,成都610041

出　　处：《电子科技大学学报》2023年第3期322-330,共9页Journal of University of Electronic Science and Technology of China

基　　金：国家重点研发计划(2018YFA0306102,2022YFA1405900,2018YFA0307400);国家自然科学基金(12074058,91836102,61704164);四川省科技计划项目(2021YJ0089)。

摘　　要：基于硅基CMOS工艺,设计并制备了一维光声晶体微腔器件,在极低温(28 mK)条件下对该微腔的光学模式(光纤通信波段)和声学模式(~5.344 GHz)进行了表征,利用脉冲光驱动和单光子探测方法实现了声学模式的声子计数。其中的关键技术是利用脉冲光驱动微腔散射光子且产生(或减少)声子,这种脉冲光驱动方法可以减少光的加热效应以保持低声子占据率;再通过级联窄带宽光纤法布里-珀罗滤波器对泵浦光子进行选择滤波,之后测量得到的散射光子可以精确地计算声学模式中的声子数。实验得到的平均声子数为0.14±0.03,进入了少声子区间,为声学量子态在量子计算、量子精密测量、量子换能器等领域的应用奠定了基础。A one-dimensional optomechanical crystal nanobeam was designed and fabricated using typical CMOS process.The optical mode(in the fiber optic communication band)and the acoustic mode(~5.344 GHz)were characterized at very low temperatures(28 mK),and the phonon counting experiment was achieved using pulsed optical pumping and single photon detection methods.This kind of pulsed optical pumping can scatter photons at the cavity frequency and can generate(or reduce)acoustic phonon numbers.This pulsed light pumping method can also reduce the heating effect of light and maintain low phonon occupancy;then the pump photons are selectively filtered by cascading narrow-bandwidth fiber Fabry-Pérot filters,after which the scattered photons are measured to accurately calculate the average phonon occupancy of the mechanical mode.The experimentally obtained average phonon occupancy is,reaching the few phonon level,which lays the foundation for application of acoustic quantum state in quantum computing,quantum precision measurements,quantum transducer and other related fields.

关 键 词：声学量子态 一维光声晶体微腔 声子计数 脉冲光激励 

分 类 号：O42[理学—声学] O43[理学—物理]