单电机驱动广义椭偏仪变角结构设计与实现  

Design and implementation of variable angle mechanism of generalized ellipsometer driven by single motor

作　　者：刘政杰 薛鹏 陈媛媛[1,3,4] 刘燕霖[1,3,4] 谢大洋 张瑞 LIU Zhengjie;XUE Peng;CHEN Yuanyuan;LIU Yanlin;XIE Dayang;ZHANG Rui(School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;School of Electrical and Control Engineering,North University of China,Taiyuan 030051,China;Institute of Frontier and Interdisciplinary Science,North University of China,Taiyuan 030051,China;Shanxi Province Optoelectronic Information and Instrument Engineering Technology Research Center,Taiyuan 030051,China)

机构地区：[1]中北大学信息与通信工程学院,山西太原030051 [2]中北大学电气与控制工程学院,山西太原030051 [3]中北大学前沿交叉科学研究院,山西太原030051 [4]山西省光电信息与仪器工程技术研究中心,山西太原030051

出　　处：《应用光学》2023年第3期507-512,共6页Journal of Applied Optics

基　　金：国家自然科学基金(62105302);山西省青年科学基金(20210302124269)。

摘　　要：针对目前常见广义椭偏仪变角结构多采用双电机驱动,且存在结构复杂、变角后光路存在偏离等问题,论文提出一种单电机驱动广义椭偏仪新的变角结构。该结构采用固定起偏臂,利用同步齿轮传动单电机驱动方式使载物台和检偏臂同步旋转,实现椭偏仪多角度测量。在传统卧式结构广义椭偏仪变角结构基础上,设置样品载物台和检偏臂1∶2同步传动,并通过Inventor运动仿真验证了本结构的可行性。论文提出的单电机驱动变角结构变角后不仅维持了变角前后的准直,而且其整体结构简单,极大地优化了椭偏仪变角的复杂度,在广义椭偏仪工程化进程中有比较重要的应用价值。Aiming at the problems that the variable angle mechanism of generalized ellipsometer is mostly driven by dual motors,and has complex structure as well as deviation of optical path after angle variation,a new variable angle mechanism of generalized ellipsometer driven by single motor was proposed.A fixed polarization generation arm was adopted by the structure,which was driven by a single motor geared by the synchronous gear to rotate the loading platform and the polarization detection arm synchronously,so as to realize the multi-angle measurement of the ellipsometer.On the basis of the traditional horizontal variable angle mechanism of the generalized ellipsometer,the 1:2 synchronous transmission of loading platform and polarization detection arm was set up,and the feasibility of the structure was verified by Inventor motion simulation.The proposed single motor driven variable angle mechanism not only maintained the collimation before and after the angle variation,but also had a simple overall structure,which greatly optimized the complexity of the ellipsometer angle variation,and had an important application value in the engineering process of the generalized ellipsometer.

关 键 词：单电机驱动 广义椭偏仪 变角结构 同步齿轮 穆勒矩阵 

分 类 号：TN202[电子电信—物理电子学]