抑制相干噪声的照明系统仿真与误差分析  

Simulation and error analysis of illumination system with coherent noise suppression

作　　者：齐先豪 韩森[1,2] 张凌华 吴先钰 程俊 边小月 QI Xianhao;HAN Sen;ZHANG Linghua;WU Xianyu;CHENG Jun;BIAN Xiaoyue(School of Optical-electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China;Suzhou H&L Instruments LLC,Suzhou 215123,China;School of Physical Science and Technology,Suzhou University of Science and Technology,Suzhou 215009,China)

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093 [2]苏州慧利仪器有限责任公司,江苏苏州215123 [3]苏州科技大学物理科学与技术学院,江苏苏州215009

出　　处：《应用光学》2023年第3期533-538,共6页Journal of Applied Optics

基　　金：国家自然科学基金(62127901)。

摘　　要：提出通过离轴照明系统抑制相干噪声的方案,设计了一种具有抑制相干噪声能力的照明系统。通过Zemax的非序列模式对照明系统进行仿真,得到了厚度为90μm的离轴环形光斑,验证了此照明系统对相干噪声的抑制能力。将其作为19.05 mm(3/4英寸)Fizeau干涉仪的光源,设置对比实验,光源波长为632 nm,设置圆形噪点尺寸为120μm~500μm和尺寸为100μm×350μm的划痕。对设计的照明系统进行误差分析,优化照明系统成像质量,调整干涉系统参数,最终在照明光环宽度为42μm、干涉腔长为15 mm情况下,干涉条纹的对比度提升至97.60%。A scheme for coherent noise suppression by an off-axis illumination system was proposed,and an illumination system with the ability to suppress coherent noise was designed.The illumination system was simulated by the non-sequential mode of Zemax to obtain an off-axis annular light spot with a thickness of 90μm.To verify the ability of this illumination system to suppress coherent noise,it was used as the light source of a 19.05 mm(3/4 inch)Fizeau interferometer.A comparative experiment was carried out with a light source wavelength of 632 nm,and scratches were set with the circular noise spots size of 120μm~500μm and the size of 100μm×350μm.Error analysis of this illumination system was performed to optimize the imaging quality of the illumination system and adjust the parameters of the interferometric system.Finally,the contrast of the interference fringe was improved to 97.60%with illumination ring thickness of 42μm and interference cavity length of 15 mm.

关 键 词：干涉测量 相干噪声 照明仿真 条纹对比度 

分 类 号：TN202[电子电信—物理电子学]