真空热处理炉绝缘陶瓷对钽粉杂质的影响  

Effect of Insulating Ceramics on Tantalum Powder Impurities in Vacuum Heat Treatment Furnace

作　　者：桂愉平 王彦杰 李少军 雒国清 马应会 杜威 GUI Yu-ping;WANG Yan-jie;LI Shao-jun;LUO Guo-qing;MA Ying-hui;DU Wei(Ningxia Orient Tantalum Industry Co.,Ltd.,Shizuishan Ningxia 753000,China;National Engineering Research Center of Tantalum and Niobium,Shizuishan Ningxia 753000,China)

机构地区：[1]宁夏东方钽业股份有限公司,宁夏石嘴山山753000 [2]国家钽铌特种金属材料工程技术研究中心,宁夏石嘴山753000

出　　处：《热处理技术与装备》2023年第2期64-67,共4页Heat Treatment Technology and Equipment

摘　　要：主要研究了真空热处理炉绝缘陶瓷在投入使用前的一种适用性检测方法,并通过对比95氧化铝陶瓷、99氧化铝陶瓷、氮化硼陶瓷和氮化铝陶瓷杂质结果,分析了真空热处理炉绝缘陶瓷对钽粉杂质的影响。结果表明:95氧化铝陶瓷会造成钽粉Fe、Si杂质增加,氮化硼陶瓷会造成钽粉B、N杂质增加,而氮化铝陶瓷会造成钽粉Al、N、C杂质增加。99氧化铝陶瓷对钽粉杂质的影响最小,但在1100~1380℃温度范围内会导致钽粉Al杂质增加,可以通过减少炉内绝缘陶瓷的面积来降低Al杂质。A applicability testing method of insulating ceramics in vacuum heat treatment furnace was studied.By comparing the impurity results of 95 alumina ceramics,99 alumina ceramics,boron nitride ceramics and aluminum nitride ceramics,the influence of insulating ceramics of vacuum heat treatment furnace on tantalum powder impurities was analyzed.The results showed that the 95 alumina ceramics would increase Fe and Si impurities in tantalum powder,boron nitride ceramics would increase B and N impurities in tantalum powder,however,aluminum nitride ceramics would increase Al,N and C impurities in tantalum powder.The effect of 99 alumina ceramics on tantalum powder impurities was the least,but it would lead to the increase of Al impurities in tantalum powder in the temperature range from 1100 to 1380℃.The Al impurities could be reduced by reducing the area of insulating ceramic in the furnace.

关 键 词：真空热处理炉 绝缘陶瓷 氧化铝陶瓷 氮化硼陶瓷 氮化铝陶瓷 钽粉 杂质 

分 类 号：TG146.416[一般工业技术—材料科学与工程]