超高加速度宏微运动平台基座模态分析与优化设计  

Modal Analysis and Optimization Design of Ultra-high Acceleration Macro-Micro Motion Platform Base

作　　者：张璐凡 姜薄士 张鹏启 唐静静[1] 任彩霞[1] ZHANG Lufan;JIANG Boshi;ZHANG Pengqi;TANG Jingjing;REN Caixia(School of Mechanical and Electrical Engineering,Henan University of Technology,Zhengzhou Henan 450001,China)

机构地区：[1]河南工业大学机电工程学院,河南郑州450001

出　　处：《机床与液压》2023年第9期151-156,共6页Machine Tool & Hydraulics

基　　金：国家自然科学基金青年科学基金项目(51705132);河南省科技厅自然科学项目(222102220088);河南省教育厅项目(21A460006)。

摘　　要：超高加速度宏微运动平台基座与音圈电机共振会严重影响平台的定位精度。以基座为研究对象,以提高基座1阶固有频率和降低质量为研究目标,利用SolidWorks和ANSYS Workbench进行模态分析、拓扑优化、直接优化和响应面优化分析,获得了模态振型、固有频率和优化方案,并对优化后的模型重新进行有限元分析。结果表明:基座1阶固有频率增加6.8%,质量减小8%,提高1阶固有频率同时实现了基座轻量化。The resonance between the ultra-high acceleration macro-micro motion platform base and the voice coil motor can seriously affect the positioning accuracy of the platform.Taking the base as the research object,with the aim of improving the first-order natural frequency of the base and reducing the mass,the methods of modal analysis,topology optimization,direct optimization and response surface optimization were made by using SolidWorks and ANSYS Workbench.The modal mode shape,natural frequency and optimization scheme were obtained,and the finite element analysis were performed on the optimized model again.The results show that the first-order natural frequency of the base increases by 6.8%,and the mass decreases by 8.0%.The first-order natural frequency is improved,and also the base lightweight is realized.

关 键 词：宏微运动平台 基座 模态分析 优化设计 

分 类 号：TH69[机械工程—机械制造及自动化]