非球面超精密车削对刀误差补偿  

Tool setting error compensation technology in ultra-precision turning of aspheric surfaces

作　　者：唐林峰 李云[1] 吕保斌[1] TANG Linfeng;LI Yun;L Baobin(Institute of Optics and Electronics of the Chinese Academy of Sciences,Chengdu 610209,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]中国科学院大学,北京100049

出　　处：《现代制造工程》2023年第5期74-78,共5页Modern Manufacturing Engineering

摘　　要：为提高非球面超精密车削的加工精度和加工效率,通过分析非球面的面形特点和超精密车削过程中对刀误差等因素的成因,建立了刀具对刀误差对非球面加工面形误差影响的仿真模型。仿真分析进一步揭示了刀具对刀误差所带来的面形误差变化规律。试验结果表明,通过刀具对刀误差补偿,非球面超精密车削后的面形精度PV=179 nm,表面粗糙度均方根RMS=45.4 nm。试验验证了理论分析和刀具对刀误差补偿方法的正确性。To improve the machining accuracy and machining efficiency of aspheric surfaces using ultra-precision turning,the simulation models of the influence of tool setting errors on the figure error of aspheric surface were established by analyzing the surface shape characteristics of aspheric surface and the causes of tool setting errors in ultra-precision turning.The simulation analysis further reveals the pattern of surface shape error caused by tool setting error.The experimental results show that the surface shape accuracy PV value and surface roughness RMS value of the aspheric surface after ultra-precision turning are 179 nm and 45.4 nm,respectively.The correctness of theoretical analysis and tool setting error compensation method were verified by experiments.

关 键 词：非球面 超精密车削 对刀误差 仿真 

分 类 号：TH161[机械工程—机械制造及自动化]