TEM模式同轴谐振腔低气压放电蒙特卡罗仿真和实验研究  

Monte Carlo Simulation and Experimental Study on Low-Pressure Discharge of Coaxial Resonator in TEM Mode

作　　者：彭玉彬 茅张松 周昊楠 曾鸣奇 胥钧埕 贺永宁[1,2] PENG Yubin;MAO Zhangsong;ZHOU Haonan;ZENG Mingqi;XU Juncheng;HE Yongning(School of Microelectronics,Xi’an Jiaotong University,Xi’an 710049,China;The Key Lab of Micro-nano Electronics and System Integration of Xi'an City,Xi’an 710049,China)

机构地区：[1]西安交通大学电子与信息学部微电子学院,西安710049 [2]西安市微纳电子与系统集成重点实验室,西安710049

出　　处：《真空科学与技术学报》2023年第4期290-297,共8页Chinese Journal of Vacuum Science and Technology

摘　　要：随着无线通信系统高频小型化的发展趋势,对微波滤波器设计提出更为严苛的要求。其中功率容量作为衡量滤波器性能的重要指标,在滤波器尺寸不断缩小的情形下面临严峻的挑战。谐振器作为滤波器基本组成单元,对单一谐振器的功率容量准确预测十分重要。本文针对工作频率在2.6 GHz的TEM模式同轴谐振器,将电容加载的耦合结构近似为平行平板结构,利用单粒子蒙特卡罗方法仿真获得同轴谐振器临界击穿电场,实现了对该结构同轴谐振腔的低气压放电功率阈值仿真预测。对所设计同轴谐振腔开展低气压放电实验研究,获得了100~1000 Pa气压范围内击穿功率阈值随气压的变化关系实验曲线,并验证了单粒子蒙特卡罗仿真预测方法的准确性。With the development trend of high-frequency miniaturization of wireless communication systems,the design of microwave filter is more stringent.As an important index to measure the performance of the filter,the power handling capacity is faced with severe challenges when the filter size is shrinking.The resonator is the basic component of the filter.It is very important to predict the power handling capacity of a single resonator accurately.In this paper,the capacitance-loaded coupling structure is approximated as a parallel plate structure for a coaxial resonator operating at 2.6 GHz in TEM mode.The critical breakdown electric field of the coaxial resonator is obtained by using the single-particle Monte Carlo method,and the low-pressure discharge power threshold of the coaxial resonator is simulated and predicted.The low-pressure discharge experiment of the designed coaxial resonator was carried out,and the experimental curve of the breakdown power threshold with the pressure in the range of 100~1000 Pa was obtained,and the accuracy of the single-particle Monte Carlo simulation prediction method was verified.

关 键 词：蒙特卡罗数值模拟 低气压放电 同轴谐振腔 功率阈值 

分 类 号：TN13[电子电信—物理电子学]