溅射功率对La-Ti/WS_(2)复合薄膜高温摩擦学行为的影响  

Effect of Sputtering Power on High Temperature Tribological Behavior of La-Ti/WS_(2)Composite Films

作　　者：蔡海潮[1,2] 薛玉君 叶军 王景华[4] 庞碧涛[5] 李航 Cai Haichao;Xue Yujun;Ye Jun;Wang Jinghua;Pang Bitao;Li Hang(School of Mechatronics Engineering,Henan University of Science and Technology,Luoyang 471003,China;Longmen Laboratory,Luoyang 471003,China;Henan Key Laboratory for Machinery Design and Transmission System,Henan University of Science and Technology,Luoyang 471003,China;Luoyang Bearing Research Institute Co.,Ltd,Luoyang 471039,China;State Key Laboratory of Aviation Precision Bearings,Luoyang 471039,China)

机构地区：[1]河南科技大学机电工程学院,河南洛阳471003 [2]龙门实验室,河南洛阳471003 [3]河南科技大学机械设计及传动系统重点实验室,河南洛阳471003 [4]洛阳轴承研究所有限公司,河南洛阳471039 [5]航空精密轴承国家重点实验室,河南洛阳471039

出　　处：《稀有金属材料与工程》2023年第4期1201-1209,共9页Rare Metal Materials and Engineering

基　　金：National Key Research and Development Program of China(2021YFB3400401);Science and Technology Research Project of Henan Province(202102210073)。

摘　　要：高温条件下WS_(2)易于氧化生成WO3,导致WS_(2)固体润滑薄膜的摩擦学性能受到较大影响。为改善WS_(2)固体润滑薄膜在高温条件下的摩擦学性能,采用非平衡磁控溅射技术制备了共掺杂La-Ti/WS_(2)复合薄膜,研究了靶功率对磁控溅射La-Ti/WS_(2)复合薄膜结构和高温摩擦学性能的影响。利用扫描电镜(SEM)、X射线衍射仪(XRD)、纳米压痕仪和X射线光电子能谱仪(XPS)分析了薄膜微观形貌、成分、力学性能、微观结构。利用高温摩擦磨损试验机研究了复合薄膜的高温摩擦学性能。结果表明,高温环境下,靶功率为20W时La-Ti/WS_(2)复合薄膜表现出优异的摩擦学性能。此时,复合薄膜H/E值最大,摩擦系数最小,平均为0.012,磨损率最低为1.56×10^(-8)mm^(3)/N·m,这主要归因于高温下摩擦界面产生的稀土氧化物,促使La-Ti/WS_(2)复合薄膜的摩擦磨损机制发生了改变,使得WS_(2)在高温受破坏的情况下仍然具有优异的摩擦学性能,从而进一步拓展了WS_(2)复合薄膜的工程应用范围。Under high temperature conditions,the crystal WS_(2)is easily oxidized to WO3,which has a great impact on the tribological properties of WS_(2)solid lubrication films.In order to improve the tribological properties of WS_(2)solid lubricating films at high temperatures,the co-doped La-Ti/WS_(2)composite films were prepared by unbalanced magnetron sputtering.The effects of target power on the structure and tribological properties of La-Ti/WS_(2)composite films were studied.The micromorphology,composition,mechanical properties and microstructure of the films were analyzed by scanning electron microscopy(SEM),X-ray diffraction(XRD),nano indentation and X-ray photoelectron spectroscopy(XPS).The high temperature tribological properties of composite films were researched by high temperature friction tester.The results show that La-Ti/WS_(2)composite films show excellent tribological properties when the target power is 20 W at high temperature.At this time,the H/E value of the composite film is the largest,the friction coefficient is the smallest with the average value of 0.012,and the wear rate is the lowest,which is 1.56×10^(-8)mm^(3)/N·m.This is mainly due to the production of rare earth oxides at the friction interface at high temperatures,which change the friction and wear mechanism of La-Ti/WS_(2)composite film,so that WS_(2)still has excellent tribological properties when it is damaged at high temperature,further expanding the scope of engineering application of WS_(2)composite films.

关 键 词：稀土 高温 摩擦 WS_(2)薄膜 

分 类 号：TB383.2[一般工业技术—材料科学与工程]