玻璃光学元件精密模压成形技术  

Precision Molding for Glass Optical Components

作　　者：刘光宇[1] 房丰洲[1] Liu Guangyu;Fang Fengzhou(State Key Laboratory of Precision Measuring Technology&Instruments,Laboratory of Micro/Nano Manufacturing Technology(MNMT),Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,微纳制造实验室,天津300072

出　　处：《光学学报》2023年第8期186-213,共28页Acta Optica Sinica

基　　金：国家自然科学基金(52035009)。

摘　　要：介绍了玻璃光学元件精密模压成形技术的原理、玻璃材料、模具制造、模具表面镀膜、结合有限元仿真的模压工艺优化和模压成形设备等核心技术的研究进展,并讨论了当前存在的问题。通过探讨玻璃模压成形技术在自由曲面、微结构、衍射结构表面和晶圆阵列等光学元件中的应用现状,对玻璃元件精密模压成形技术的发展趋势和挑战进行了展望。Significance As one of the important optical components in optical systems,lenses are widely used in products for imaging,illumination,and optical communications.In general,lenses can be divided into spherical,aspheric,freeform,and microstructure surfaces according to different surface shapes.Among them,the spherical lens is the simplest optical component in terms of design and manufacturing,but the aberration problem exists when a single lens is used,and the bulky lens assembly has to be used for compensation.In contrast,aspheric and freeform lenses have more flexible surface shapes,and the specific optical performance of lenses can be improved by such methods as aberration correction,beam shaping,and field of view expansion,which are beneficial for realizing high precision and integration of optical systems.Optical glass and plastic are the main raw materials for lens manufacturing.Plastic is more economic and lighter,but glass has better mechanical properties,higher thermal stability,and higher refractive index,which meets the demanding requirements of optical performance and stability for most products.High-precision glass spherical lenses have achieved mass production by grinding and polishing,but aspheric,freeform,and microstructure lenses can only be processed one by one with the traditional subtractive manufacturing methods for their complex and irregular shapes.In some cases,even several non-traditional polishing methods such as magnetorheological finishing(MRF)and ion beam polishing(IBP)have to be used to produce high-precision surfaces,which is time-consuming and costly.Therefore,an effective and low-cost processing method is required for the mass production of such lenses.Molding is a classical processing method to produce parts by replicating the mold shape.However,conventional fused silica glass was not friendly to the mold life for its high transition temperature(about 1300℃),which limited the development of glass molding.Until the 1980s,glass with a low transition temperature emerged,and it coul

关 键 词：光学设计 光学玻璃 非球面透镜 自由曲面透镜 超精密加工 玻璃精密模压 微结构制造 

分 类 号：O43[机械工程—光学工程]