硫系玻璃衍射面模压成型仿真分析与实验研究  

Simulation Analysis and Experimental Study on Compression Molding of Chalcogenide-Glass Diffractive Surface

作　　者：陈津平 刘悦 李闯[1,2] 宋鹏[1,2] 薛常喜 Chen Jinping;Liu Yue;Li Chuang;Song Peng;Xue Changxi(School of Opto-Electronic Engineering,Changchun University of Science and Technology,Changchun 130022,Jilin,China;Key Laboratory of Advanced Optical System Design and Manufacturing Technology of the Universities of Jilin Province,Changchun University of Science and Technology,Changchun 130022,Jilin,China)

机构地区：[1]长春理工大学光电工程学院,吉林长春130022 [2]长春理工大学先进光学设计与制造技术吉林省高校重点实验室,吉林长春130022

出　　处：《光学学报》2023年第8期366-374,共9页Acta Optica Sinica

基　　金：吉林省自然科学基金(20220101124JC)。

摘　　要：为了减小玻璃模压工艺中硫系玻璃衍射光学元件的面形误差,对衍射结构的填充效果和衍射光学元件的应力进行研究。建立了局部衍射结构有限元仿真分析模型,分析了模压温度、模压速度、摩擦系数等因素对衍射结构填充效果和应力的影响,并在仿真结果的指导下进行实验研究,实验结果表明衍射结构的填充效果和应力对面形均有影响,衍射结构填充得越充分、应力越小,成型透镜的面形精度越高,最终得到的成型透镜面形误差为0.3053μm,表面粗糙度Ra为2.95 nm。Objective Precision compression molding is an important technology in lens processing.Diffractive optical elements(DOEs)have special optical and temperature characteristics and are of great application value in infrared optical systems.They are widely used in the field of infrared detection and infrared imaging technology.DOEs are widely used in modern optical systems because of their small size and light mass.Of all processing technologies,PGM technology can be used to manufacture optical elements of various wavelength levels.The rapid manufacturing of DOEs with chalcogenide glass can be achieved by precision molding technology,which meets the mass production requirements of infrared DOEs.The influences of the diffractive structure filling and the maximum stress on the surface precision of the lens are studied in this paper to improve the diffraction efficiency and reduce the surface precision deviation of the DOE in the compression molding process.Methods In this paper,simulations and experiments are used to study the influences of the diffractive structure filling and the maximum stress on the surface precision of the lens.Firstly,the finite element simulation method is used to analyze the molding process so as to study the filling condition and stress distribution of the diffraction structure under different process parameters.The diffraction structure is too small compared with the size of the whole lens,and hence,the filling effect of the diffraction structure cannot be accurately judged from the simulations.Therefore,a simulation model for the local diffraction structure is built to analyze the effects of molding temperature,pressing velocity,and friction coefficient on the filling and maximum stress of the diffraction structure.Then,the molding experiment of the chalcogenide-glass diffraction surface is carried out.The mold used in the experiment is made of microcrystalline aluminum RSA905,and the glass preform is IG6.Since the friction coefficient of the mold cannot be controlled,the changing process par

关 键 词：光学设计 模压成型 衍射结构 有限元仿真 应力 填充 

分 类 号：O439[机械工程—光学工程]