A SiC asymmetric cell trench MOSFET with a split gate and integrated p^(+)-poly Si/SiC heterojunction freewheeling diode  

作　　者：蒋铠哲 张孝冬 田川 张升荣 郑理强 赫荣钊 沈重 Kaizhe Jiang;Xiaodong Zhang;Chuan Tian;Shengrong Zhang;Liqiang Zheng;Rongzhao He;Chong Shen(State Key Laboratory of Marine Resource Utilization in South China Sea,Hainan University,Haikou 570228,China;Institute of Deep-Sea Science and Engineering,Chinese Academy of Sciences,Sanya 572000,China;Sansha Guohaixintong Technology Development Co.,Ltd,Haikou 570100,China)

机构地区：[1]State Key Laboratory of Marine Resource Utilization in South China Sea,Hainan University,Haikou 570228,China [2]Institute of Deep-Sea Science and Engineering,Chinese Academy of Sciences,Sanya 572000,China [3]Sansha Guohaixintong Technology Development Co.,Ltd,Haikou 570100,China

出　　处：《Chinese Physics B》2023年第5期697-704,共8页中国物理B（英文版）

基　　金：Major Science and Technology Projects of Hainan Province,China(Grant Nos.ZDKJ2021023 and ZDKJ2021042);Hainan Provincial Natural Science Foundation of China(Grant Nos.622QN285 and 521QN210)。

摘　　要：A new SiC asymmetric cell trench metal–oxide–semiconductor field effect transistor(MOSFET)with a split gate(SG)and integrated p^(+)-poly Si/SiC heterojunction freewheeling diode(SGHJD-TMOS)is investigated in this article.The SG structure of the SGHJD-TMOS structure can effectively reduce the gate-drain capacitance and reduce the high gateoxide electric field.The integrated p^(+)-poly Si/SiC heterojunction freewheeling diode substantially improves body diode characteristics and reduces switching losses without degrading the static characteristics of the device.Numerical analysis results show that,compared with the conventional asymmetric cell trench MOSFET(CA-TMOS),the high-frequency figure of merit(HF-FOM,R_(on,sp)×Q_(gd,sp))is reduced by 92.5%,and the gate-oxide electric field is reduced by 75%.In addition,the forward conduction voltage drop(V_(F))and gate-drain charge(Q_(gd))are reduced from 2.90 V and 63.5μC/cm^(2) in the CA-TMOS to 1.80 V and 26.1μC/cm^(2) in the SGHJD-TMOS,respectively.Compared with the CA-TMOS,the turn-on loss(E_(on)) and turn-off loss(E_(off)) of the SGHJD-TMOS are reduced by 21.1%and 12.2%,respectively.

关 键 词：split gate(SG) heterojunction freewheeling diode(HJD) SiC asymmetric cell trench MOSFET turn-on loss turn-off loss 

分 类 号：TN386[电子电信—物理电子学]