940nmVCSEL中DBR的反射特性分析  

Reflection Characteristics Analysis of DBR in 940 nm VCSEL

作　　者：潘智鹏 李伟[1] 吕家纲 常津源 王振诺 刘素平[1] 仲莉[1] 马骁宇[1,2] Pan Zhipeng;Li Wei;LüJiagang;Chang Jinyuan;Wang Zhennuo;Liu Suping;Zhong Li;Ma Xiaoyu(National Engineering Research Center for Optoelectronic Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;College of Materials Science and Optoelectronic Technology,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院半导体研究所光电子器件国家工程中心,北京100083 [2]中国科学院大学材料科学与光电技术学院,北京100049

出　　处：《中国激光》2023年第7期182-189,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金(62174154)。

摘　　要：应用传输矩阵法计算并分析了分布式布拉格反射镜(DBR)的堆叠方式对反射谱的影响,当入射介质为GaAs材料、出射介质为空气时,DBR以低折射率层/高折射率层(LH)的方式排列具有更高的反射率。研究了入射角度对DBR反射率的影响,利用角度相关的传输矩阵模型对DBR反射谱进行计算,结果表明,DBR反射谱随着入射角度的增加而蓝移,最大反射率随着入射角度的增加而增大。建立了940 nm波长下Al_(x)GaAs的材料折射率与铝的原子数分数x之间的线性拟合模型,并通过多层剖分等效法,计算分析了渐变层对DBR反射谱特性的影响。相比于突变型DBR结构,渐变型DBR结构在维持最高反射率基本不变的情况下,反射带宽有所减小。Objective As an ideal light source for 3D cameras,940 nm vertical cavity surface emitting lasers(VCSELs)have broad application prospects and can be used in virtual reality and car-assisted driving.The optimal design of the distributed Bragg reflector(DBR)is crucial for improving the performance characteristics of 940 nm VCSELs.In traditional research,there are few studies on DBRs in the 940 nm band.To provide guidance for the design and optimization of DBR structures in 940 nm VCSELs,we systematically study the reflection properties of various DBR structures.In the present study,we apply the transmission matrix method(TMM)to multilayer dielectric films to calculate and analyze the influence of different stacking methods and periods on the DBR reflection spectrum.The model is modified and the influence of the incident angle on the DBR reflection spectrum is calculated and analyzed.A linear fitting model between the refractive index of AlxGaAs and Al atomic fraction x at a wavelength of 940 nm is established.The effect of the gradient layer on the reflectance spectrum characteristics of the DBR is calculated and analyzed using the multilayer division equivalent method.Through our research analysis,the relationship between the DBR structure and its reflective properties can be understood more clearly.Methods In this study,we choose Al0.89GaAs as the DBR low-refractive-index layer material(L)and Al0.09GaAs as the DBR high-refractive-index layer material(H)with refractive indices of 3.497 and 3.040,respectively.The reflection characteristics of different DBR structures are analyzed using the TMM.First,we use the transmission matrix of the multilayer dielectric film to study the effects of different stacking methods and periods on the reflection characteristics of the DBR structure.Subsequently,considering the influence of the incident angle on the reflection spectrum,we modify the transmission matrix and study the influence of different incident angles on the reflection characteristics of the DBR.Finally,to simplify t

关 键 词：激光器 传输矩阵法 垂直腔面发射激光器 分布式布拉格反射镜 入射角度 渐变层 反射谱 

分 类 号：TN248.4[电子电信—物理电子学]