基于蒙特卡罗方法的离子束溅射熔融石英、硅、金和铜行为特征规律仿真研究  

Simulation Study on Behavior Characteristics of Ion-Beam Sputtering to Fused Silica,Silicon,Gold,and Copper Using Monte Carlo Method

作　　者：胡邦杰 张清华[2] 刘民才[2] 许乔[2] 李亚国[1] Hu Bangjie;Zhang Qinghua;Liu Mincai;Xu Qiao;Li Yaguo(Fine Optical Engineering Research Center,Chengdu 610041,Sichuan,China;Research Center of Laser Fusion,China Academy of Engineering Physics,Mianyang 621900,Sichuan,China)

机构地区：[1]成都精密光学工程研究中心,四川成都610041 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《激光与光电子学进展》2023年第7期245-252,共8页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(62175221,51505444);中国工程物理研究院创新发展基金(CX2019025);中国工程物理研究院激光聚变研究中心青年人才基金(LFRC-PD012)。

摘　　要：采用蒙特卡罗方法研究了在不同溅射参数和材料模型下,溅射产额、损伤密度分布和纵向能量损伤分布等溅射特征参量对离子束溅射作用效果的影响。通过SRIM-2013软件的粒子跟踪和物理统计结果,分析了离子束初始能量、入射角度、离子种类和材料类型对表面溅射效果和能量沉积的影响规律,研究了表面损伤分布规律与溅射参数和溅射产额的关系。结果表明:85°的束源倾角设置可促进级联粒子密度集中和密度峰值群向表面移动分别达到2.8×10^(8)atom/cm^(2)和3×10^(-10)m,平均能量损失减小45.6%,Ar^(+)溅射产额提高4.7倍;声子和电离产生大量的能量损失抑制了溅射产额的提高,两种能量损失占总损失比在0°入射时分别可达69%和30%。In this study,the Monte Carlo method is used to examine the effects on the sputtering characteristic parameters of sputtering yields,damage density distributions,and longitudinal energy damage distributions with different sputtering parameters and material models.Based on the particle tracking and physical statistical results of SRIM-2013 software,the effects of the initial energy of the ion beam,incident angle,ion type,and material type on surface sputtering and energy deposition are analyzed,and the relationship among surface damage distribution,sputtering parameters,and sputtering yield are studied.The results show that a beam-source inclination of 85°can promote the density concentration and peak density group of cascading particles to a surface of 2.8×10^(8)atom/cm^(2)and 3×10^(-10)m,respectively,thereby reducing the average energy loss by 45.6%and increasing the Ar^(+)sputtering yield by a factor of 4.7.The substantial energy loss caused by phonons and ionization inhibits the increase in sputtering yield,and the two energy losses account for 69%and 30%of the total loss,respectively,at an incidence angle of 0°.

关 键 词：材料 蒙特卡罗方法 离子束 SRIM 溅射产额 损伤分布 能量损失 

分 类 号：O484.[理学—固体物理]