三维表面形貌测量中的共聚焦显微成像技术研究进展  

Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

作　　者：王玥颖 刘旭[1] 郝翔[1,2] Wang Yueying;Liu Xu;Hao Xiang(College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,Zhejiang,China;Intelligence Optics and Photonics Research Center,Jiaxing Research Institute,Zhejiang University,Jiaxing 314000,Zhejiang,China)

机构地区：[1]浙江大学光电科学与工程学院,浙江杭州310027 [2]浙江大学嘉兴研究院智能光电创新中心,浙江嘉兴314000

出　　处：《激光与光电子学进展》2023年第8期127-138,共12页Laser & Optoelectronics Progress

基　　金：国家自然科学基金重大研究计划培育项目(92050115);国家重点研发计划(2022YFB3206000);中央高校基本科研业务费专项资金(2022QZJH29);浙江省自然科学基金重点项目(LZ21F050003);浙江省“领雁”研发攻关计划(2022C01077)。

摘　　要：随着精密仪器制造和半导体加工产业的蓬勃发展,对微小结构表面形貌的观察和测量是现代科学研究的一个重要方向。激光扫描共聚焦显微成像技术因高分辨率、高信噪比和优秀的层切能力在三维表面形貌测量领域备受青睐。介绍共聚焦显微成像技术的基本原理,并对适用于三维表面形貌测量领域的共聚焦显微成像方法进行综述,包括共聚焦成像的不同扫描方法、不同探测手段及基于光谱的共聚焦成像技术。最后,对共聚焦显微成像技术未来的发展趋势进行展望。With the rapid development of precision instrument manufacturing and semiconductor processing industry,the observation and measurement of micro-structure surface profile has become an important orientation of scientific research.Laser scanning confocal microscopy becomes popular in three-dimensional(3D)surface topography because of its high resolution,high signal-to-noise ratio,and excellent optical sectioning ability.In this paper,we first introduce the basic principle of the confocal microscopy.Further,various confocal microscopic methods used in 3D surface topography measurement are reviewed,including different scanning methods,different detection methods,and different spectral-based confocal imaging methods.Finally,the future developments of confocal microscopy are also prospected.

关 键 词：共聚焦显微成像技术 三维表面形貌测量 扫描成像 轴向定位 

分 类 号：Q436[生物学—生理学]