接触式与非接触式测量粗糙度方法探讨  

Discussion about roughness measurement by contact and non⁃contact methods

作　　者：廖奕鸥 冯辉[1] 张重远[1] LIAO Yiou;FENG Hui;ZHANG Zhongyuan(Analysis and Testing Center,Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China)

机构地区：[1]中国科学院金属研究所分析测试中心,辽宁沈阳110016

出　　处：《物理测试》2023年第2期32-37,共6页Physics Examination and Testing

摘　　要：就接触式与非接触式的材料表面粗糙度测量方法进行讨论,利用触针式表面形貌仪和白光干涉仪对6种不同粗糙度的标准样块进行了表面粗糙度测量。分析了两种测量方法的原理及其优缺点,其中接触式测量方法具有测量数据稳定、操作简单、测量范围大的特点,但有局限性。而非接触测量方法可以弥补接触式测量方法的不足,具有无损伤、精度高、速度快的特点。对比发现,对于6种标准样块而言,触针式表面形貌仪与白光干涉仪测量结果相近,白光干涉仪测量结果略高于触针式表面形貌仪,但均符合测量要求(示值误差不大于5%)。The surface roughness measurement of materials by contact and non⁃contact methods was discussed.The surface roughness of six standard samples with different roughness was measured by stylus⁃type surface topography instrument and white light interferometer.The principles,advantages,and disadvantages of two measurement methods were analyzed.The contact measurement method had the characteristics of stable measurement data,simple operation,and large measurement range,but it had limitations.The non⁃contact measurement method could make up the shortcomings of the contact measure⁃ment method,and had the characteristics of no damage,high precision,and fast speed.The contrast showed that the meas⁃urement results of the stylus⁃type surface topography instrument were close to those of the white light interferometer for the six standard samples.Although the measurement results of the white⁃light interferometer were slightly higher than those of the stylus⁃type surface topography instrument,they could meet the measurement requirements(the error of indication value was≤5%).

关 键 词：接触式与非接触式 触针式表面形貌仪 白光干涉仪 粗糙度 

分 类 号：TG84[金属学及工艺—公差测量技术]