分离式调控的高精度光束指向稳定系统  

High-accuracy laser spatial alignment and stabilization system with error separation technology

作　　者：马程鹏 汤孟博 孙琦 孙秋媛 丁晨良 匡翠方 MA Chengpeng;TANG Mengbo;SUN Qi;SUN Qiuyuan;DING Chenliang;KUANG Cuifang(Research Center for Intelligent Chips and Devices,Zhejiang Laboratory,Hangzhou 310023,China;State Key Laboratory of Modern Optical Instrumentation,College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,China;State Key Laboratory of Extreme Photonics and Instrumentation,ZJU-Hangzhou Global Scientific and Technological Innovation Center,Hangzhou 311200,China)

机构地区：[1]之江实验室智能芯片与器件研究中心,浙江杭州310023 [2]浙江大学光电科学与工程学院现代光学仪器国家重点实验室,浙江杭州310027 [3]极端光学技术与仪器全国重点实验室,浙江杭州311200

出　　处：《光学精密工程》2023年第11期1607-1618,共12页Optics and Precision Engineering

基　　金：国家重点研发计划项目(No.2021YFF0502700);国家自然科学基金青年科学基金资助项目(No.52105565);浙江省自然科学基金探索青年项目(No.LQ22F050015);浙江省自然科学基金资助项目(No.LD21F050002);之江实验室重大科研项目(No.2020MC0AE01)。

摘　　要：光束指向稳定系统基于对光束位置和角度的控制,能够实现对光束指向的高精度主动控制,在微纳光刻及超分辨成像等领域中发挥着重要的作用。为了实现光束的长时间指向稳定,提出一种分离式调控的小型化光束指向稳定系统,消除了传统方案中双反射镜校正带来的耦合误差,大幅度提升了光束指向精度的控制性能。对比测试结果表明,基于该方法的光束指向稳定系统对光束位置的稳定精度(RMS值)可达0.3μm,角度稳定精度(RMS值)达到1μrad;施加一定幅度的主动扰动后的测试结果表明,该系统在较大的光源抖动下仍能保持同一量级的稳定精度。相比于同样测试条件下的两种商业化光束指向稳定系统,其位置抖动与角度抖动性能可提高50%以上。The laser beam stabilization system facilitates high-precision correction of the laser beam via the control of the beam position and angle,providing long-term stability.It plays an important role in micro/nano-laser direct writing and super-resolution imaging.In this paper,a miniaturized laser stabilization system with error separation technology,which eliminates the coupling error caused by traditional dual-mirror controlling and improves the performance of laser beam stabilization control,is proposed.Comparative experiments indicate that the laser stabilization system based on this method stabilized the beam position with an accuracy better than 0.3μm(RMS)and stabilized the angle with an accuracy better than 1μrad(RMS).The results of test experiments with active disturbance indicate that the system maintained the same performance.Compared with two commercial laser stabilization systems under the same conditions,the proposed system can yield 50%lower position and angle jitter.

关 键 词：光束稳定 高精度校正 高精度角度检测 误差分离技术 

分 类 号：TN248.2[电子电信—物理电子学]