光楔分光中波红外Fizeau型干涉仪光学系统设计  

Optical system design of wedge beam splitter splitting mid-wave infrared Fizeau interferometer

作　　者：杨帅 李杨 张文喜 伍洲 覃日康 樊耀轩 Yang Shuai;Li Yang;Zhang Wenxi;Wu Zhou;Qin Rikang;Fan Yaoxuan(Aerospace Information Research Institute,Chinese Academy of Sciences,Beijing 100094,China;School of Optoelectronics,University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院空天信息创新研究院,北京100094 [2]中国科学院大学光电学院,北京100049

出　　处：《光电工程》2023年第5期103-113,共11页Opto-Electronic Engineering

基　　金：中国科学院战略性先导科技专项(XDC07040300)。

摘　　要：针对中波红外波段胶合立方型分束镜分光局限的问题,本文提出基于光楔分光的中波红外Fizeau干涉仪光学设计方案。在3.39μm工作波长下,为降低干涉系统回程误差,提升测量准确度,采用了两次反射折叠准直光路结构,既保证良好的准直波前,同时优化设计光楔兼顾干涉成像波前。设计采用ZnSe、CaF_(2)材料,干涉仪准直镜为单片平凸非球面结构,成像镜由双分离式球面镜构成,经蒙特卡罗模拟公差分析,准直镜0.1°视场内准直波前PV优于λ/4,归一化出射孔径内角像差优于3.01×10^(−5)rad;干涉成像光路归一化视场成像波前PV优于λ/5,在25 lp/mm处MTF值优于0.38,干涉系统最大成像畸变优于0.11%;在标准面0°视场放置,被测表面倾斜0.05°内干涉系统回程误差小于λ/50。基于光楔分光的中波红外Fizeau干涉仪为中波红外干涉仪光学系统设计提供了新的思路。To solve the problem of beam splitting limitation of cemented cubic beam splitters in the mid-wave infrared band,the optical design scheme of mid-wave infrared Fizeau interferometers based on wedge splitting is proposed.At the working wavelength of 3.39μm,to reduce the return error of the interference system and improve the measurement accuracy,a two-reflection folding collimating optical path structure is adopted,which not only ensures a good collimating wavefront,but also optimizes the design of the optical wedge to take into account the wavefront quality of the interference imaging.ZnSe and CaF2 materials are used,the collimator of the interferometer is a single plano-convex aspheric structure,and the imaging lens is composed of two separate spherical mirrors.Through the Montecarlo simulation tolerance analysis,the collimator wavefront PV of the collimator within 0.1°field of view is better thanλ/4.The normalized field of view imaging wavefront PV of the interferometric optical path is better thanλ/5;The interferometric system return error is smaller thanλ/50 at 0°field of view placed on the standard surface and the surface under test is tilted within 0.05°.

关 键 词：中波红外干涉仪 光楔分光 像差理论 光学设计 

分 类 号：O439[机械工程—光学工程]