基于多向冷冻法制备的高灵敏度柔性电容式压力传感器  

High-sensitive flexible capacitive pressure sensor based on multi-directional freezing method

作　　者：王菲菲 彭海益 姚晓刚[1] WANG Feifei;PENG Haiyi;YAO Xiaogang(Shanghai Institute of Ceramics,Chinese Academy of Sciences,Shanghai 201800,China;College of Materials Science and Engineering,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]中国科学院上海硅酸盐研究所,上海200050 [2]重庆理工大学材料科学与工程学院,重庆400054

出　　处：《复合材料学报》2023年第5期2680-2687,共8页Acta Materiae Compositae Sinica

摘　　要：近年来柔性电容压力传感器因兼具优异的力学性能和良好的灵敏性,广泛应用于医学诊断、电子皮肤、人工智能等重要领域。本文围绕提升电容式柔性传感器的灵敏度为目标,设计了一种基于多向冷冻工艺构筑的三维交联网络结构多壁碳纳米管(MWCNTs)/聚二甲基硅烷(PDMS)海绵为介质层的柔性电容式压力传感器,并对该传感器的制造过程、传感机制、响应性能和人体适用性进行表征。结果表明:通过多向冷冻法可成功构建三维网络结构MWCNTs/PDMS海绵介质层,且此介质层组装的柔性电容式压力传感器具有较高灵敏度(~1.94 kPa-1)、低检测限(~4 Pa)、快响应时间(~250 ms)、良好稳定性及人体适用性。该柔性传感器在可穿戴电子产品中具有良好的应用前景。In recent years,flexible capacitive pressure sensors have been widely used in medical diagnosis,electronic skin,artificial intelligence and other important fields due to their excellent mechanical properties and good sensitivity.In order to improve the sensitivity of the capacitive flexible sensor,a flexible capacitive pressure sensor with a three-dimensional network cross-linked multi-wall carbon nanotubes(MWCNTs)/polydimethylsilane(PDMS)sponge as the dielectric layer was designed based on multi-directional freezing process.The manufacturing process,sensing mechanism,response performance and human suitability of the sensor were characterized.The results show that:The three-dimensional network structure of MWCNTs/PDMS sponge dielectric layer is successfully constructed by multi-direction freezing method,and the flexible capacitive is assembled by this dieletric layer.It has high sensitivity(~1.94 kPa−1),low detection limit(~4 Pa),fast response time(~250 ms),good stability and human suitability.The flexible sensor has a good application prospect in wearable electronic products.

关 键 词：电容式柔性传感器 多向冷冻法 介质层 多壁碳纳米管 聚二甲基硅氧烷 

分 类 号：TB332[一般工业技术—材料科学与工程]