光斑及线重合度对飞秒激光环形刻蚀SiC/SiC复合材料的影响  

Effect of Spot and Line Overlap on Femtosecond Laser Ablation of SiC/SiC Composite

作　　者：方菊 刘壮[1] 李元成 张晓兵 FANG Ju;LIU Zhuang;LI Yuancheng;ZHANG Xiaobing(College of Mechanical and Electronic Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China;AVIC Manufacturing Technology Institute,Beijing 100024,China)

机构地区：[1]南京航空航天大学机电学院,江苏南京210016 [2]中国航空制造技术研究院,北京100024

出　　处：《机械制造与自动化》2023年第3期7-10,共4页Machine Building & Automation

基　　金：国家科技重大专项(2017-VII-0015-0111)。

摘　　要：采用飞秒激光对SiC/SiC复合材料进行环形扫描刻蚀去除试验,分析脉冲能量、光斑重合度及线重合度对加工区域材料残留及环形凹槽外轮廓的影响。结果表明:光斑重合度、线重合度和脉冲能量显著影响光束扫描面积内的能量密度,材料去除量随扫描能量密度的增大而增大。在较小光斑重合度和线重合度条件下,即能量密度较小时,刻蚀槽外轮廓呈现锯齿状,且扫描轨迹间有较多材料残留。随着光斑重合度和线重合度的增大,外轮廓及底面趋于光滑。Spiral scanning ablation was carried out on SiC/SiC composite using femtosecond laser to study the effects of pulse energy,spot overlap and line overlap on material residue in propessing area and ablated profile.The results show that spot overlap,line overlap and pulse energy enormously influence the energy density of the beam scanning area,and the volume of material removal increases along with the increase of scanning energy density.Under the condition of smaller spot overlap and line overlap,namely in lower energy density,the ablated contour appears rougher with more material residue between the scanning tracks.As the spot overlap and line overlap increase,the outer contour and bottom tend to be smoother.

关 键 词：飞秒激光 环形刻蚀 SIC/SIC复合材料 光斑重合度 线重合度 

分 类 号：TB333[一般工业技术—材料科学与工程] V261.8[航空宇航科学与技术—航空宇航制造工程]