TiB_(2)掺杂WS_(2)复合薄膜的宽温域摩擦学性能研究  

Tribological Properties of TiB_(2) Doped WS_(2) Composite Films in Wide Temperature Range

作　　者：刘进龙 李红轩[2] 吉利[2] 刘晓红[2] 张定军[1] LIU Jin-long;LI Hong-xuan;JI Li;LIU Xiao-hong;ZHANG Ding-jun(School of Material Science and Engineering,Lanzhou University of Technology,Lanzhou 730030,China;State Key Laboratory of Solid Lubrication,Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000,China)

机构地区：[1]兰州理工大学材料科学与工程学院,兰州730030 [2]中国科学院兰州化学物理研究所固体润滑国家重点实验室,兰州730000

出　　处：《表面技术》2023年第6期235-245,共11页Surface Technology

基　　金：国家自然科学基金(U2141210,51975561);中国科学院青年创新促进会优秀会员计划(Y202084)。

摘　　要：目的探究TiB_(2)溅射电流(即TiB_(2)含量)对WS_(2)/TiB_(2)复合薄膜在宽温域(25~500℃)下摩擦学性能的影响。方法采用非平衡磁控溅射技术制备WS_(2)/TiB_(2)复合薄膜。通过场发射扫描电子显微镜(FESEM)、高分辨率透射电子显微镜(HRTEM)观察薄膜的形貌及结构;通过X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)表征薄膜结构;通过纳米压痕仪(Anton Paar,NHT^(2))评价薄膜的机械性能;利用高温球盘摩擦磨损试验机(THT01,03591)测试薄膜的摩擦学性能;采用光学显微镜(Olympus,STM6)、三维轮廓仪(MicroXAM-800)观察磨痕及磨斑形貌,通过HRTEM分析磨痕和磨斑的结构。结果TiB_(2)掺杂使WS_(2)薄膜由高度结晶态向非晶态转变,增大了薄膜的致密度并提高了其机械性能。随着TiB_(2)溅射电流的增大,复合薄膜的摩擦因数和磨损率呈先下降后上升的趋势。随着试验温度的升高,复合薄膜的摩擦因数先降低后升高,但磨损率一直逐渐升高。TiB_(2)溅射电流为1.5A时,制备的复合薄膜在宽温域(25~500℃)具有较低的摩擦因数和磨损率。300℃条件下,TiB_(2)溅射电流为1.5 A时制备的复合薄膜在摩擦剪切力作用下重新定向形成了TiB_(2)(101)晶体取向和平行于滑动方向的WS_(2)(002)晶体取向,并在高环境温度和摩擦热作用下氧化形成了润滑相TiO2(001)晶体结构。结论TiB_(2)溅射电流为1.5 A时制备的复合薄膜具有优异的宽温域摩擦学性能。薄膜致密的非晶结构、高的硬度和弹性模量,以及在摩擦剪切力和高温氧化作用下重新结晶取向是低摩擦磨损的关键。The work aims to investigate the effect of TiB_(2) sputtering current(the content of TiB_(2))on tribological properties of WS_(2)/TiB_(2) composite films in wide temperature range(25-500℃).WS_(2)/TiB_(2) composite films were prepared by non-equilibrium magnetron sputtering.The morphology and structure of the films were observed by field emission scanning electron microscopy(FESEM)and high resolution transmission electron microscope(HRTEM).The structure of the films was characterized by X-ray diffractometer(XRD)and X-ray photoelectron spectrometer(XPS).The mechanical properties of the films were evaluated by nanoindentation instrument(Anton Paar,NHT^(2)).The tribological properties of the films were tested by a high temperature ball disc friction and wear tester(THT01,03591).Optical microscope(Olympus,STM6)and three-dimensional profilometer(Micro XAM-800)were used to observe the morphology of wear tracks and wear scars,and HRTEM was used to analyze the structure of wear tracks and wear scars.TiB_(2) doped WS_(2) films changed from highly crystalline to amorphous state,and the surface morphology of composite films changed from"worm-like"to"island-like",improving the density and mechanical properties.With the increase of TiB_(2) sputtering current,the friction coefficient and wear rate of the composite films decreased firstly and then increased.In addition,as the test temperature rose,the friction coefficient of the composite films firstly decreased and then increased,but the wear rate was gradually increasing.Among them,sputtering current of TiB_(2) with 1.5 A contributed to the lowest friction coefficient and wear rate in wide temperature range(25-500℃).The friction coefficients of composite films at 100 and 300℃at sputtering current with 0-2.5 A were lower than those at 25 and 500℃,while the friction coefficient of composite film prepared with TiB_(2) sputtering current of 4.0 A was opposite.By analyzing the wear tracks and corresponding wear scars of composite films prepared with sputtering current of 1.

关 键 词：WS_(2)/TiB_(2)复合薄膜 宽温域 机械性能 摩擦磨损 晶体取向 

分 类 号：TB383.2[一般工业技术—材料科学与工程]