化学水浴法合成硫化铅探测器的红外响应研究  

Infrared Response of Lead Sulfide Detector Synthesized from Chemical Bath Deposition

作　　者：杨冬 申钧[1,3] 高恺聪 冷重钱 聂长斌[1] 张之胜 YANG Dong;SHEN Jun;GAO Kaicong;LENG Chongqian;NIE Changbin;ZHANG Zhisheng(Chongqing Institute of Green and Intelligent Technology,Chongqing 400714,China;Chongqing School,University of Chinese Academy of Sciences,Chongqing 400714,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院重庆绿色智能技术研究院,重庆400714 [2]中国科学院大学重庆学院,重庆400714 [3]中国科学院大学,北京100049

出　　处：《红外技术》2023年第6期559-566,共8页Infrared Technology

基　　金：北京市工程技术研究中心基金项目(BG0231);重庆市自然科学基金面上项目(cstc2021jcyj-msxmX0389)。

摘　　要：硫化铅探测器具有短波红外高灵敏度、低俄歇噪声等优点,其中化学水浴法合成的硫化铅薄膜可与CMOS半导体工艺兼容,有利于实现低成本高性能的面阵探测器。然而,目前对化学水浴法合成硫化铅探测器的研究主要集中在较大尺寸的单元探测器。本文基于化学水浴法合成硫化铅薄膜,利用离子束刻蚀工艺,制备了10~200μm尺寸的硫化铅光电探测器,研究了器件光电性能随电阻、长宽比、线宽等参数的变化。结果表明,随着尺寸的减小,硫化铅光电探测器的响应度逐渐增加,在1550 nm短波红外光的照射下,10μm级器件的响应度达到了51.68 A/W,约为200μm级器件的123倍,且在可见光和2.7μm红外波长下也具有良好的宽波段光电响应。本文研究的微米尺寸探测器件可为硫化铅探测器研究提供一定的支撑。A lead sulfide detector has the advantages of high short-wave infrared sensitivity and low auger noise.The lead sulfide film synthesized by chemical bath deposition can be compatible with the CMOS semiconductor process,which is beneficial for identifying low-cost and high-performance surface array detectors.However,the current research on lead sulfide detectors synthesized by chemical bath deposition primarily focuses on the larger unit detectors.In this study,the synthesis of lead sulfide film was based on chemical bath deposition.Lead sulfide photodetectors of 10–200mm size were prepared using an ion beam etching process and the photoelectric performance of the device was studied in terms of resistance,aspect ratio,line width,and other parameters.The results showed that the responsivity of the PbS photodetector increased gradually as the size decreased.Under the irradiation of 1550 nm short-wave infrared light,the responsivity of the 10μm photodetector was 51.68 A/W,which was approximately 123 times the responsivity of the 200mm photodetector.Moreover,the PbS photodetector also had a good wide-range photoelectric response at visible light and 2.7mm infrared wavelengths.The micron-size detector of this study can provide support for the research of lead sulfide detectors.

关 键 词：化学水浴法 硫化铅 光电探测器 红外探测器 

分 类 号：TN362[电子电信—物理电子学]