基于行列寻址的压电超声换能器柔性曲面阵的研制  

Development of Flexible Curved Array for Piezoelectric Ultrasonic Transducers Based on Row and Column Addressing

作　　者：秦芸 王智豪 张国军[1] 杨玉华[1] 何常德[1] 王任鑫[1] Qin Yun;Wang Zhihao;Zhang Guojun;Yang Yuhua;He Changde;Wang Renxin(State Key Laboratory of Dynamic Measurement Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学省部共建动态测试技术国家重点实验室,太原030051

出　　处：《微纳电子技术》2023年第5期786-792,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(61927807,52275578);科技部重点研发计划(2020YFC0122102);山西省基础研究计划(20210302123027,20210302124203);山西省“1331工程”重点学科建设计划(1331KSC)。

摘　　要：锆钛酸铅(PZT)压电超声换能器材料由于其优异的压电性能而在微电子机械系统(MEMS)领域受到了广泛的关注。订制了边长4 cm的PZT压电陶瓷片,将压电陶瓷片与柔性印刷电路板(PCB)键合,将压电陶瓷片划成2.45 mm×2.45 mm的阵元,在沟槽内填充环氧树脂胶。将键合后的压电陶瓷片粘在曲面模具上,溅射金属形成上电极,制成14×14阵元的曲面阵,其曲率半径为10 cm。此曲面阵采用行列寻址(RCA)的方式可以在水中测到发射和接收信号,并且可以对体模进行脉冲回波成像,在超声成像领域有广阔的发展前景。制备的曲面阵可为研制直径20 cm的柱面阵提供参考。Lead zirconate titanate(PZT)piezoelectric ultrasonic transducer materials have received extensive attention in the field of micro-electromechanical system(MEMS)due to their excellent piezoelectric properties.The PZT piezoelectric ceramic slice with a side length of 4 cm was ordered,and the piezoelectric ceramic slice was bonded with the flexible printed circuit board(PCB).The piezoelectric ceramic slice was divided into 2.45 mm×2.45 mm array elements,the grooves were filled with epoxy resin glue.The bonded piezoelectric ceramic slice was stuck on the curved surface mold,and the upper electrode was formed by sputtering metal.The curved array of 14×14 array elements with a radius of curvature of 10 cm was fabricated.With row and column addressing(RCA)mode,the curved array can measure transmitting and receiving signals in water and perform pulse echo imaging of the phantom.It has a broad development prospect in the field of ultrasonic imaging.The prepared curved array can provide the reference for developing a cylindrical array with a diameter of 20 cm.

关 键 词：压电超声换能器 压电陶瓷片 柔性印刷电路板(PCB) 曲面阵 行列寻址(RCA) 

分 类 号：TB552[理学—物理] TH703[理学—声学]