超精密加工机床发展现状与趋势  

Development Status and Trend of Ultra-precision Machine Tools

作　　者：陈启迪 胡小龙[2] 吝敏 张涛 周志雄 Chen Qidi;Hu Xiaolong;Lin Min;Zhang Tao;Zhou Zhixiong(不详;China North Vehicle Research Institute,Beijing 100072,China)

机构地区：[1]中国北方车辆研究所,北京市100072 [2]湖南大学机械与运载工程学院

出　　处：《工具技术》2023年第6期3-9,共7页Tool Engineering

基　　金：国家自然科学基金(51375156)。

摘　　要：超精密加工技术是高端制造领域的一项关键技术,而超精密加工机床装备则是超精密加工技术的重要载体。通过系统总结超精密加工机床的发展现状,重点介绍典型结构的超精密加工机床,从加工精度和加工性能的角度对上述几类超精密加工机床进行比较分析,并对超精密加工的发展趋势进行预测。Ultra-precision processing technology is a key point in high technology and science fields,and ultra-precision machine tool is the basis of ultra-precision processing.This paper systematically summarizes the development status of ultra-precision machine tools,and mainly introduces the typical structures of them,the above types of ultra-precision machine tools are compared and analyzed from the perspective of machining accuracy and performance,and the development trend of ultra-precision machining is forecasted.

关 键 词：超精密机床 机床结构 关键部件 

分 类 号：TG502[金属学及工艺—金属切削加工及机床] TH16[机械工程—机械制造及自动化]