自扩散过程中聚二甲基硅氧烷印章微结构表面力学性能研究  

Research on Surface Mechanical Properties of Polydimethylsiloxane Stamp Microstructures in Self-diffusion Process

作　　者：夏栩婷 任俊 杨彧涵 刘禹 王晓龙[2] Xu-ting Xia;Jun Ren;Yu-han Yang;Yu Liu;Xiao-long Wang(School of Mechanical Engineering,Jiangnan University,Wuxi 214122;Lanzhou Institute of Chemical Physics,Chinese Academy of Sciences,Lanzhou 730000)

机构地区：[1]江南大学机械工程学院,无锡214122 [2]中国科学院兰州化学物理研究所,兰州730000

出　　处：《高分子学报》2023年第7期1113-1121,共9页Acta Polymerica Sinica

基　　金：国家自然科学基金(基金号51875253)资助项目.

摘　　要：为了探究微接触印刷时,有机溶剂在聚二甲基硅氧烷(PDMS)内部微纳孔隙中自扩散对PDMS印章表面微结构的影响,制备了一系列具有不同高宽比微结构、不同墨水含量以及不同交联剂比例的PDMS印章,并进一步揭示了高宽比、墨水自扩散程度以及交联剂比例对印章表面微结构的模量、黏附力和几何尺寸的影响.该结果可用于作为制备具有较高结构稳定性和印刷精度的PDMS弹性印章的参考基础.In micro-contact printing,the structural stability and shape accuracy of the elastomeric stamp are critical for structural printing with high resolution and precision.When printing alkanethiols on gold surfaces,the self-diffusion phenomenon of organic solvents occurring in the micro-nano pores inside polydimethylsiloxane(PDMS)during the ink dipping process tends to change the mechanical properties and geometry of the stamp,thus affecting the accuracy and effectiveness of the printed patterns.In order to investigate the effect of this self-diffusion phenomenon on the microstructure of the PDMS stamp surface,PDMS stamps with microstructure patterns of different aspect ratios were prepared by casting off on a lithographic silicon wafer template.PDMS stamps with different HDT mass fractions were prepared by immersing the PDMS stamps in 1-hexadecanethiol(HDT)and by controlling the time of self-diffusion of HDT inside PDMS,and based on optical microscopy,scanning electron microscopy(SEM)and atomic force microscopy(AFM)measurements,the effects of the self-diffusion process on the structural stability of the stamp microstructures,surface adhesion and the shape accuracy of the patterns.The results show that the self-diffusion of HDT causes a decrease in both the modulus and adhesion of the PDMS stamped microstructure,and the structural stability of the microstructure with an aspect ratio of 1:1 is relatively best.Secondly,the longer the time of self-diffusion,the higher the content of HDT inside the PDMS,the greater the decrease in the modulus and adhesion of the microstructure,and the higher the shape expansion of its pattern.In addition,the effect of curing agent content on the Young's modulus and adhesion force of PDMS stamp microstructures was investigated by varying the ratio of prepolymer to curing agent.The results can be used as a reference basis for the preparation of PDMS elastic stamps with high structural stability and printing accuracy.

关 键 词：微接触印刷 自扩散 聚二甲基硅氧烷 原子力显微镜 结构稳定性 

分 类 号：O631[理学—高分子化学] TS951.34[理学—化学]