激光参数对陶瓷微孔加工质量的影响  

The influence of picosecond laser processing parameters on the quality of micropore punching on alumina ceramic

作　　者：谢明锋 吴勇华 闫永君 简运祺 徐俊飞 XIE Mingfeng;WU Yonghua;YAN Yongjun;JIAN Yunqi;XU Junfei(Department of Intelligent Manufacturing,WuYi University,Jiangmen 529020,China;Institute of Intelligent Laser Technology of Jiangmen,Jiangmen 529009,China)

机构地区：[1]五邑大学智能制造学部,江门529020 [2]广东省江门智能激光技术研究院,江门529009

出　　处：《现代制造工程》2023年第6期78-84,共7页Modern Manufacturing Engineering

基　　金：广东省重大科技专项计划资助项目(2020A080201009);广东省自然科学基金资助项目(S2018010008735)。

摘　　要：为研究激光加工氧化铝陶瓷高质量微孔的成型工艺,采用皮秒激光自旋切割模式在0.3 mm厚的氧化铝陶瓷上加工直径为0.2 mm的微通孔。研究了激光加工参数(激光功率、离焦量、重复频率、打孔次数及扫描速度)对微孔质量的影响。试验结果表明,随着激光功率的增加,孔的入口、出口直径增大,入口、出口圆度和锥度呈现减小的趋势;随着扫描速度的降低,孔的锥度呈下降趋势;随着负离焦量的增大微孔锥度逐渐减小;重复频率的变化对微孔质量各性能指标影响不大。试验发现激光功率和离焦量是影响微孔质量主要因素。最终在功率为27 W、离焦量为-0.7 mm、扫描速度为400 mm/s、重复频率为100 kHz及打孔次数为10次时获得入口圆度为2.995μm、出口圆度为3.509μm及锥度为5.96°的高质量微孔。In order to explore the forming process of high-quality micropores of alumina ceramics processed by picosecond laser,the picosecond laser in spin cutting mode was used to process micropores with a diameter of 0.2 mm on 0.3 mm thickness alumina ceramics.The effects of laser processing parameters such as laser power,defocus distance,repetition frequency,number of punches and scanning speed on micropore quality were studied.The experimental results show that with the increase of laser power,the diameter of the inlet and outlet of the hole increases,and the roundness and taper of the inlet and outlet show a decreasing trend.With the decrease of the scanning speed,the taper of the hole showed a downward trend;as the negative defocus absolute value increases,the micropore taper gradually decreases;the change of repetition frequency has little impact on the performance index of micropore quality;the core factors affecting the quality of the micropores are laser power and defocus.Finally,under the parameters of 27 W power,defocus distance-0.7 mm,scanning speed 400 mm/s,repetition frequency 100 kHz,and punching times 10,high quality micropore with entrance roundness 2.995μm,exit roundness 3.509μm,and taper 5.96°are obtained.

关 键 词：皮秒激光 氧化铝陶瓷 微孔 激光功率 离焦量 

分 类 号：TN249[电子电信—物理电子学]