基于PDMS海绵介质的柔性光纤压力传感器制备及性能研究  

Preparation and Performance of Flexible Optical Fiber Pressure Sensor Based on PDMS Sponge Medium

作　　者：张会新[1] 林雅坤 洪明森 洪应平[1] 隋丹丹 ZHANG Huixin;LIN Yakun;HONG Mingsen;HONG Yingping;SUI Dandan(Key Laboratory of Instrument Science and Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051;No.214 Institute of China North Industries Group,Suzhou 215000)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中国兵器工业集团第二一四研究所,苏州215000

出　　处：《舰船电子工程》2023年第3期177-182,共6页Ship Electronic Engineering

基　　金：国家自然科学基金项目(编号:51822003)资助。

摘　　要：为了提高柔性光纤压力传感器的灵敏度和稳定性,对压力传感器结构设计、结构参数及制作工艺进行了研究。设计并制作了基于海绵增敏结构下的不同厚度和不同固化温度的光纤压力传感器。对比了不同参数下传感器的性能得出了最佳的厚度和固化温度,最后利用光频域反射计(OFDR)测量了光纤应变变化。结果表明,在PDMS基底配比和固化时间恒定的情况下,厚度和固化温度均对柔性光纤压力传感器的灵敏度有影响,并验证了当施加压力的范围为0~276.2kPa,加压的步长为27.7kPa时,PDMS厚度3mm,固化温度80℃的传感器灵敏度最高,可达6.65με/kPa。同时,柔性压力传感器具有柔韧、轻薄、可测量复杂曲面等优点,为航天航海领域弧形物体表面压力测量提供了可靠的解决方案。In order to improve the sensitivity and stability of the flexible optical fiber pressure sensor,the structural and rele⁃vant parameters and fabrication process of the pressure sensor are studied.Optical fiber pressure sensors with different thicknesses and curing temperatures based on sponge sensitization structure are designed and manufactured.The performance of the sensors un⁃der different parameters is compared to get the best thicknesses and curing temperatures.Finally,the fiber strain change is mea⁃sured by optical frequency domain reflectometer(OFDR).The results show that the sensitivity of the flexible optical fiber pressure sensor is influenced by the thicknesses and curing temperatures under the same condition of the concentration ratio and curing time.The sensitivity of the sensor with PDMS substrate thickness of 3mm and curing temperatures of 80℃is the highest,which can reach 6.65με/kPa,when the pressure range is 0~276.2kPa and the step size of pressurizing is 27.6kPa.At the same time,the flexible pressure sensor has the advantages of flexibility,lightness and thinness,and can measure complex curved surfaces,which provides a reliable solution for measuring the surface pressure of curved objects in the field of aerospace and navigation.

关 键 词：PDMS 光纤压力传感器 灵敏度 光频域反射计 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN253[自动化与计算机技术—控制科学与工程]