基于电磁辐射的静电放电定位探测系统  

Detection System for ESD Event Based on Electromagnetic Radiation

作　　者：张泽端 欧阳吉庭[1] 邓成志 王荣刚 ZHANG Zeduan;OUYANG Jiting;DENG Chengzhi;WANG Ronggang(School of Physics,Beijing Institute of Technology,Beijing 100081,China;Suzhou TA&A Ultra Clean Technology Co.,Ltd,Suzhou 215121,China)

机构地区：[1]北京理工大学物理学院,北京100081 [2]苏州天华超净科技股份有限公司,江苏苏州215121

出　　处：《测试技术学报》2023年第4期277-283,共7页Journal of Test and Measurement Technology

摘　　要：静电放电(ESD)是一种常见的工业危害源,对ESD的探测和监控是制定静电防护措施的基础。为了实现对ESD事件的监测定位,并使之应用于各类场景,以ESD电磁辐射为目标源,基于4天线阵列及定位算法,建立了一套紧凑型ESD事件探测系统,并对系统的探测性能和定位精度进行了实验验证。结果表明,该系统可定位3 m范围内,放电能量大于1.5μJ的ESD事件,且定位误差小于15 cm。紧凑的结构与较低的探测限使该系统具备较好的便携性与通用性。Electrostatic discharge(ESD)is one of the most hazardous sources in the industry.Detection and monitoring of ESD source is the basis for formulating electrostatic protection measures.In order to realize the monitoring and positioning of ESD events and make them applicable to various scenarios,this paper takes ESD electromagnetic radiation as the target source,based on a 4-antenna array and positioning algorithm,and establishes a compact ESD event detection system.The detection performance and positioning accuracy are experimentally verified.The experimental results show that the system can locate ESD events with discharge energy greater than 1.5μJ within 3 m,and the positioning error is less than 15 cm.The compact structure and lower detection limit make the system have better portability and versatility.

关 键 词：静电放电 电磁辐射 探测 定位 

分 类 号：TP202.2[自动化与计算机技术—检测技术与自动化装置]