大口径ZnSe晶体单点金刚石车削工艺技术研究  

Single Point Turning Technology of Large Diameter ZnSe Crystals

作　　者：兰喜瑞 张宇佳 孙宏宇[1] 吴凡 LAN Xirui;ZHANG Yujia;SUN Hongyu;WU Fan(Academy of Opto-Electronics,China Electronics Technology Group Corporation(AOE CETC),Tianjin,China)

机构地区：[1]中国电子科技集团公司光电研究院,天津

出　　处：《光电技术应用》2023年第3期72-74,84,共4页Electro-Optic Technology Application

摘　　要：表面质量是衡量大口径ZnSe晶体能否用于红外成像和激光光学系统中最重要评价参数之一。大口径ZnSe晶体通常采用单点金刚石车削的加工方式。这种方式表面容易产生白点、云雾状缺陷,严重影响红外和激光光学系统质量。ZnSe晶体的表面质量与主轴转速、进给速度、切削深度、刀具半径等多个加工工艺参数影响因素密切相关。采用Taguchi法设计加工实验,对各个工艺参数进行深入研究,得到优化加工工艺参数组合,最终得到大口径ZnSe晶体的加工工艺技术方案。Surface quality is one of the most important evaluation parameters to evaluate whether large diameter ZnSe crystals can be used in infrared imaging and laser optical systems.Large diameter ZnSe crystals are usually processed by single point diamond turning.In this way,the surface is easy to appear white spots and cloud defects,which seriously affect the quality of infrared and laser optical systems.The surface quality of ZnSe crystal is closely related to the spindle speed,feed speed,cutting depth,tool radius and other processing parameters.The Taguchi method is used to design processing experiments,and each process parameter is deeply studied to obtain the optimized processing parameter combination,and the processing technology scheme of large diameter ZnSe crystal is obtained.

关 键 词：大口径ZnSe晶体 单点金刚石车削 加工工艺参数 Taguchi法 

分 类 号：TH161.4[机械工程—机械制造及自动化]