原位加热电镜技术研究WO_(3)-BiVO_(4)非晶复合薄膜退火相变过程  

Phase transition of WO_(3)⁃BiVO_(4) amorphous composite film investigated by in⁃situ heating electron microscopy

作　　者：宋海利 黄荣[2] SONG Hai-li;HUANG Rong(Key Laboratory of Bioinorganic and Synthetic Chemistry of Ministry of Education,School of Chemistry,Sun Yat-sen University,Guangzhou Guangdong 510006;Key Laboratory of Polar Materials and Devices(MOE)and Department of Electronics,East China Normal University,Shanghai 200062,China)

机构地区：[1]中山大学化学学院,生物无机与合成化学教育部重点实验室,广东广州510006 [2]华东师范大学,极化材料与器件教育部重点实验室,上海200062

出　　处：《电子显微学报》2023年第3期283-290,共8页Journal of Chinese Electron Microscopy Society

基　　金：广东省基础与应用基础研究基金(No.2020A1515110178);中山大学本科教学质量工程项目.

摘　　要：本文利用原位加热电镜技术和高分辨透射电镜研究了WO_(3)-BiVO_(4)非晶复合薄膜原位退火相变过程。退火过程中,薄膜中的Bi元素逐渐挥发,由于电镜中的高真空缺氧环境,加热到600℃时,形成的结晶相大部分为立方W相,少量的WO_(x)(0<x≤3)、VO_(x)(0<x≤25)和BixVOy(0<x≤1,0<y≤4)氧化物晶相,完全不同于利用脉冲激光沉积方法在充足氧气气氛和600℃条件下生长退火后形成的WO_(3)纳米柱嵌入BiVO_(4)基质中的垂直异质外延结晶复合薄膜。因此,退火气氛和样品的受热方式对薄膜的结晶相变过程有很大影响。The phase transition of WO_(3)-BiVO_(4)amorphous composite film was investigated by in-situ heating electron microscopy.During the annealing process,Bi elements were easily evaporated.The main crystalline phase was a cubic W phase with a small amount of orthorhombic WO_(x),orthorhombic VO_(x) and tetragonal BixVOy phases when the film was heated to 600℃.This is different from the vertical heteroepitaxial crystalline composite film with WO_(3)nanopillars embedded in the BiVO_(4)matrix grown in the sufficient oxygen at 600℃by pulsed laser deposition.Thus,the atmosphere during the annealing process and the heating mode greatly influence the crystallization process of the composite film.

关 键 词：原位加热电镜技术 WO_(3)-BiVO_(4)复合薄膜 退火相变 

分 类 号：TG115.215.3[金属学及工艺—物理冶金] O484.1[金属学及工艺—金属学] O76[理学—固体物理] TB34[理学—物理]